Modeling of surface roughness for ARXPS

Physica Status Solidi (C) Current Topics in Solid State Physics

Volumn 4, Issue 6, 2007, Pages 1817-1821

  Oswald, S ^a   Oswald, F ^a  

^a IFW DRESDEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ANGLE-RESOLVED X-RAY PHOTOELECTRON SPECTROSCOPY; APPLIED SURFACE; EFFECTIVE THICKNESS; MODEL CALCULATIONS; MODELING OF SURFACE ROUGHNESS; NON-DESTRUCTIVE; OVERLAYERS;

CEMENTS; COMPUTATIONAL METHODS; COMPUTER SIMULATION; DATA STRUCTURES; DEPTH PROFILING; MODEL STRUCTURES; MOLECULAR ORBITALS; MOLECULAR SPECTROSCOPY; PHOTOELECTRON SPECTROSCOPY; SURFACE ROUGHNESS; X RAY PHOTOELECTRON SPECTROSCOPY;

SURFACE ANALYSIS;

EID: 49749088724     PISSN: 18626351     EISSN: None     Source Type: Journal    
DOI: 10.1002/pssc.200675220     Document Type: Conference Paper

References (9)

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2. P.J. Cumpson, ArCtic ARXPS-Spreadsheet, Crown Copyright 1998, Version 1.0, http://www.npl.co.uk.
3. R.W. Paynter, Surf. Interface Anal. 27, 103 (1999).
4. M. Kozlowska, R. Reiche, S. Oswald, H. Vinzelberg, R. Hübner, and K. Wetzig, Surf. Interface Anal. 36, 1600 (2004).
5. S. Oswald, R. Reiche, M. Zier, and K. Wetzig, Surf. Interface Anal. 38, 590 (2006).
6. S. Oswald and F. Oswald, J. Appl. Phys. 100, 104504 (2006).
7. P.J. Cumpson and M.P. Seah, Surf. Interface Anal. 25, 430 (1997).
8. S. Oswald, R. Reiche, M. Zier, and K. Wetzig, Appl. Surf. Sci. 252, 3 (2005).
9. M. Zier, S. Oswald, R. Reiche, and K. Wetzig, Appl. Surf. Sci. 252, 234 (2005).