Laser induced crystallization of hydrogenated amorphous silicon-carbon alloys

Journal of Applied Physics

Volumn 96, Issue 7, 2004, Pages 3998-4005

  Summonte, C ^a   Rizzoli, R ^a   Servidori, M ^a   Milita, S ^a   Nicoletti, S ^a   Bianconi, M ^a   Desalvo, A ^b   Iencinella, D ^b  

^a CNR   (Italy)

^b UNIVERSITY OF BOLOGNA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; CARBON; CROSSLINKING; CRYSTALLIZATION; EXCIMER LASERS; FILM GROWTH; HYDROGEN BONDS; HYDROGENATION; INFRARED SPECTROSCOPY; METHANE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILANES; STOICHIOMETRY; SYNCHROTRONS; X RAY DIFFRACTION;

GAS MIXTURES; GRAIN FORMATION; LASER INDUCED CRYSTALLIZATION; MICROCRYSTALLINE SILICON;

AMORPHOUS ALLOYS;

EID: 7244260393     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1778822     Document Type: Article

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