Power density effects on the growth of microcrystalline silicon-carbon alloys by PECVD

Thin Solid Films

Volumn 427, Issue 1-2, 2003, Pages 284-288

  Coscia, U ^a   Ambrosone, G ^a   Lettieri, S ^a   Maddalena, P ^a   Rava, P ^b   Minarini, C ^c  

^a UNIVERSITY OF NAPLES FEDERICO II   (Italy)

^b Elettrorava Spa ^*  (Italy)

^c ENEA   (Italy)

Author keywords

Microcrystalline; PECVD; Silicon carbon

Indexed keywords

GRAIN SIZE AND SHAPE; LIGHT EMITTING DIODES; METHANE; PHASE TRANSITIONS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON CARBIDE; SOLAR CELLS; THIN FILM TRANSISTORS; X RAY DIFFRACTION ANALYSIS;

GAS MIXTURES;

AMORPHOUS FILMS;

EID: 0037416623     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(02)01145-8     Document Type: Conference Paper

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