Heat transfer and phase transformations in laser annealing of thin Si films

Journal of Heat Transfer

Volumn 124, Issue 2, 2002, Pages 253-264

  Moon, Seung Jae ^a   Lee, Minghong ^a   Grigoropoulos, Costas P ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Crystal growth; Heat transfer; Laser; Solidification; Thin films

Indexed keywords

AMORPHOUS SILICON; ANNEALING; CRYSTAL GROWTH; LIQUID CRYSTAL DISPLAYS; NUCLEATION; PHASE TRANSITIONS; POLYSILICON; SOLIDIFICATION; THIN FILMS;

RESOLIDIFICATION;

HEAT TRANSFER;

CRYSTALLIZATION; HEAT TRANSFER; PHASE CHANGE; SILICON; SOLIDIFICATION;

EID: 0036537446     PISSN: 00221481     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.1447941     Document Type: Article

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