KrF excimer laser crystallization of silicon thin films

Journal of Materials Science: Materials in Electronics

Volumn 11, Issue 7, 2000, Pages 557-563

  Summers, S D ^a   Reehal, H S ^a   Hirst, G J ^b  

^a LONDON SOUTH BANK UNIVERSITY   (United Kingdom)

^b Harwell Science and Innovation Campus   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL MICROSTRUCTURE; CRYSTALLIZATION; DEHYDROGENATION; ELECTRIC CONDUCTIVITY; EXCIMER LASERS; KRYPTON; MAGNETRON SPUTTERING; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAMAN SCATTERING; SEMICONDUCTING SILICON; X RAY DIFFRACTION ANALYSIS;

LASER CRYSTALLIZATION;

THIN FILMS;

EID: 0034292167     PISSN: 09574522     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1026543801619     Document Type: Article

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