Study of fluid damping effects on resonant frequency of an electromagnetically actuated valveless micropump

International Journal of Advanced Manufacturing Technology

Volumn 45, Issue 11-12, 2009, Pages 1187-1196

  Zhou, Yu ^a   Amirouche, Farid ^a  

^a University of Illinois at Chicago   (United States)

Author keywords

Dual chamber micropump; Fluid membrane coupling; MEMS; Nozzle diffuser; PDMS membrane

Indexed keywords

ANALYTICAL AND NUMERICAL SOLUTIONS; ANALYTICAL SOLUTIONS; CHAMBER MODEL; CIRCULAR MEMBRANES; DUAL-CHAMBER MICROPUMP; EFFECTIVE TOOL; ELASTIC MEMBRANES; EXCITATION FREQUENCY; FINITE ELEMENT ANALYSIS; FLUID CHAMBER; FLUID DAMPING; FLUID FLOW EFFECT; FREQUENCY-DEPENDENT; GEOMETRICAL DIMENSIONS; HIGH ASPECT RATIO; INPUT CURRENT; MAXIMUM FLOW RATE; MICRO PUMP; NOZZLE/DIFFUSER; OPENING ANGLE; PDMS MEMBRANE; POLYDIMETHYLSILOXANE PDMS; RESONANT FREQUENCIES; SLENDERNESS RATIOS; THICKNESS RATIO; VALVELESS MICROPUMPS;

ASPECT RATIO; DAMPING; DRUG DELIVERY; DYNAMIC RESPONSE; FLUIDS; MEMBRANES; MEMS; MICROCHANNELS; NATURAL FREQUENCIES; PUMPS; SILICONES;

FLOW OF FLUIDS;

EID: 71949085536     PISSN: 02683768     EISSN: 14333015     Source Type: Journal    
DOI: 10.1007/s00170-009-2053-4     Document Type: Article

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