A MEMS-based valveless impedance pump utilizing electromagnetic actuation

Journal of Micromechanics and Microengineering

Volumn 18, Issue 3, 2008, Pages

  Lee, Chia Yen ^a   Chang, Hsien Tsung ^b   Wen, Chih Yung ^b  

^a DA YEH UNIVERSITY   (Taiwan)

^b NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC IMPEDANCE; COMPUTER SOFTWARE; MEMS; MICROCHANNELS;

GLASS SUBSTRATES; MICRO COILS; PDMS DIAPHRAGM;

ELECTROMAGNETIC PUMPS;

EID: 42549120659     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/3/035044     Document Type: Article

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