-
2
-
-
1542786313
-
Micro-electro-mechanical systems (MEMS) and fluid flows
-
Ho C M and Tai Y C 1998 Micro-electro-mechanical systems (MEMS) and fluid flows Annu. Rev. Fluid Mech. 30 579-612
-
(1998)
Annu. Rev. Fluid Mech.
, vol.30
, pp. 579-612
-
-
Ho, C.M.1
Tai, Y.C.2
-
3
-
-
0003299188
-
Piezoelectric micropump with three valves working peri-statically
-
Smits J G 1990 Piezoelectric micropump with three valves working peri-statically Sensors Actuators A 15 153
-
(1990)
Sensors Actuators A
, vol.15
, pp. 153
-
-
Smits, J.G.1
-
6
-
-
0027041292
-
A micro membrane pump with electrostatic actuation
-
ed W Beneeke and H C Petzold (Germany: Tranvemunde)
-
Zengerle R, Richter A and Sandmaier H 1992 A micro membrane pump with electrostatic actuation Proc. MEMS 92 ed W Beneeke and H C Petzold (Germany: Tranvemunde) pp 19-24
-
(1992)
Proc. MEMS 92
, pp. 19-24
-
-
Zengerle, R.1
Richter, A.2
Sandmaier, H.3
-
8
-
-
0027147051
-
Micropump fabricated with the LIGA process
-
(Fort Lauderdale, FL) (New York: IEEE)
-
Rapp R, Bley P, Menz W and Schomburg W K 1993 Micropump fabricated with the LIGA process Proc. MEMS 93 (Fort Lauderdale, FL, 1993) (New York: IEEE) pp 123-26
-
(1993)
Proc. MEMS 93
, pp. 123-126
-
-
Rapp, R.1
Bley, P.2
Menz, W.3
Schomburg, W.K.4
-
9
-
-
0037679986
-
A novel piezoelectric valve-less fluid pump
-
(Yokohama, Japan, 1993) (New York: IEEE)
-
Stemme E and Stemme G 1993 A novel piezoelectric valve-less fluid pump Technical Digest IEEE Transducers 93 (Yokohama, Japan, 1993) (New York: IEEE) pp 110-13
-
(1993)
Technical Digest IEEE Transducers 93
, pp. 110-113
-
-
Stemme, E.1
Stemme, G.2
-
10
-
-
0032164907
-
Mechanical properties of thin films from load deflection of long clamped plates
-
Volker Z, Oliver P, Ulrich M, Jurg S and Henry B 1998 Mechanical properties of thin films from load deflection of long clamped plates IEEE/ASME J. Microelectromech. Syst. 7 320-8
-
(1998)
IEEE/ASME J. Microelectromech. Syst.
, vol.7
, pp. 320-328
-
-
Volker, Z.1
Oliver, P.2
Ulrich, M.3
Jurg, S.4
Henry, B.5
-
11
-
-
0029349922
-
Working principle and performance of the dynamic micropump
-
Gerlach T and Wurmus H 1995 Working principle and performance of the dynamic micropump Sensors Actuators A 50 135-40
-
(1995)
Sensors Actuators A
, vol.50
, pp. 135-140
-
-
Gerlach, T.1
Wurmus, H.2
-
12
-
-
0033098727
-
A numerical design study of the valveless diffuser pump using a lumped-mass model
-
Olsson A, Stemme G and Stemme E 1999 A numerical design study of the valveless diffuser pump using a lumped-mass model J. Micromech. Microeng. 9 34-44
-
(1999)
J. Micromech. Microeng.
, vol.9
, pp. 34-44
-
-
Olsson, A.1
Stemme, G.2
Stemme, E.3
-
14
-
-
0032097279
-
The piezoelectric valve-less pump-performance enhancement analysis
-
Ullmann A 1998 The piezoelectric valve-less pump-performance enhancement analysis Sensors Actuators A 69 97-105
-
(1998)
Sensors Actuators A
, vol.69
, pp. 97-105
-
-
Ullmann, A.1
-
15
-
-
0032141076
-
Microdiffusers as dynamic passive valves for micropump applications
-
Gerlach T 1998 Microdiffusers as dynamic passive valves for micropump applications Sensors Actuators A 69 181-91
-
(1998)
Sensors Actuators A
, vol.69
, pp. 181-191
-
-
Gerlach, T.1
-
16
-
-
0034251181
-
Numerical and experimental studies of flat-walled diffuser elements for valve-less micropumps
-
Olsson A, Stemme G and Stemme E 2000 Numerical and experimental studies of flat-walled diffuser elements for valve-less micropumps Sensors Actuators A 84 165-75
-
(2000)
Sensors Actuators A
, vol.84
, pp. 165-175
-
-
Olsson, A.1
Stemme, G.2
Stemme, E.3
-
17
-
-
0035975581
-
Analytical solutions for the dynamic analysis of a valveless micropump-a fluid-membrane coupling study
-
Pan L S, Ng T Y, Liu G R, Lam K Y and Jiang T Y 2001 Analytical solutions for the dynamic analysis of a valveless micropump-a fluid-membrane coupling study Sensors Actuators A 93 173-81
-
(2001)
Sensors Actuators A
, vol.93
, pp. 173-181
-
-
Pan, L.S.1
Ng, T.Y.2
Liu, G.R.3
Lam, K.Y.4
Jiang, T.Y.5
-
19
-
-
0029275289
-
A valve-less planar fluid pump with two pump chambers
-
Olsson A, Stemme G and Stemme E (1995) A valve-less planar fluid pump with two pump chambers Sensors Actuators A 47 549-56
-
(1995)
Sensors Actuators A
, vol.47
, pp. 549-556
-
-
Olsson, A.1
Stemme, G.2
Stemme, E.3
-
21
-
-
0030349433
-
Modeling micropumps with electrical equivalent networks
-
Bourrouina T and Grandchamp J P 1996 Modeling micropumps with electrical equivalent networks J. Micromech. Microeng. 6 398-404
-
(1996)
J. Micromech. Microeng.
, vol.6
, pp. 398-404
-
-
Bourrouina, T.1
Grandchamp, J.P.2
-
22
-
-
0034248936
-
Optimization of a piezoelectric ceramic actuator
-
Jiang T Y, Ng T Y and Lam K Y 2000 Optimization of a piezoelectric ceramic actuator Sensors Actuators A 84 81-94
-
(2000)
Sensors Actuators A
, vol.84
, pp. 81-94
-
-
Jiang, T.Y.1
Ng, T.Y.2
Lam, K.Y.3
|