A novel micromachined magnetic membrane microfluid pump

Annual International Conference of the IEEE Engineering in Medicine and Biology - Proceedings

Volumn 3, Issue , 2000, Pages 2394-2397

  Khoo, M ^a   Liu, C ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

Magnetic actuation; Membrane; Microfluidic system; Micropump; Silicone elastomer

Indexed keywords

ELECTROMAGNETIC PUMPS; FERROMAGNETIC MATERIALS; MAGNETIC FIELD EFFECTS; MAGNETIC FLUIDS; MICROMACHINING; SILICONES;

MAGNETIC ACTUATION; MICROFLUID PUMP; MICROFLUIDIC SYSTEM; MICROMACHINED MAGNETIC MEMBRANE;

MICROELECTROMECHANICAL DEVICES;

EID: 0034441338     PISSN: 05891019     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)