Magnetically actuated micropumps using an Fe-PDMS composite membrane

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6172, Issue , 2006, Pages

  Nagel, Jonathan J ^a   Mikhail, George ^a   Noh, Hongseok ^a   Koo, Jeonghoi ^b  

^a DREXEL UNIVERSITY   (United States)

^b MIAMI UNIVERSITY   (United States)

Author keywords

Magnetic actuator; Magnetic composite; Magnetic micropump; MEMS; Microactuator; Micropump; PDMS bonding; PDMS composite

Indexed keywords

MAGNETIC ACTUATORS; MAGNETIC COMPOSITES; MAGNETIC MICROPUMPS; MEMS; MICROPUMPS; PDMS BONDING; PDMS COMPOSITES; POLYDIMETHYLSILOXANE (PDMS);

IRON; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE; POLYMERIC MEMBRANES; POLYSILICON;

ELECTROMAGNETIC PUMPS;

EID: 33745934288     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.658012     Document Type: Conference Paper

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