Extreme ultraviolet multilayer mirror with near-zero IR reflectance

Optics Letters

Volumn 34, Issue 23, 2009, Pages 3680-3682

  Soer, W A ^a   Gawlitza, P ^b   Van Herpen, M M J W ^a   Jak, M J J ^a   Braun, S ^b   Muys, P ^c   Banine, V Y ^d  

^a PHILIPS RESEARCH LABORATORIES   (Netherlands)

^b FRAUNHOFER INSTITUTE FOR MATERIAL AND BEAM TECHNOLOGY IWS   (Germany)

^c Lambda Research Optics Europe   (Belgium)

^d ASML   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ANTIREFLECTION COATINGS; CARBON; CARBON DIOXIDE; COATINGS; EXTREME ULTRAVIOLET LITHOGRAPHY; MIRRORS; MULTILAYERS; REFLECTION;

ALTERNATING LAYERS; DIAMOND LIKE CARBON; EXTREME ULTRAVIOLET MULTILAYERS; EXTREME ULTRAVIOLET RADIATIONS; FUNCTIONAL PROTOTYPES; MULTI-LAYER MIRRORS; MULTI-LAYER-COATING; REFLECTANCE VALUES;

LASER MIRRORS;

EID: 71849105027     PISSN: 01469592     EISSN: 15394794     Source Type: Journal    
DOI: 10.1364/OL.34.003680     Document Type: Article

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