Spectral-purity-enhancing layer for multilayer mirrors

Optics Letters

Volumn 33, Issue 6, 2008, Pages 560-562

  Van Herpen, M M J W ^a   Van De Kruijs, R W E ^b   Klunder, D J W ^a   Louis, E ^b   Yakshin, A E ^b   Van Der Westen, S Alonso ^b   Bijkerk, F ^b   Banine, V ^c  

^a PHILIPS RESEARCH LABORATORIES   (Netherlands)

^b FOM INSTITUTE FOR PLASMA PHYSICS RIJNHUIZEN   (Netherlands)

^c ASML   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

MULTILAYER MIRRORS; OUT-OF-BAND RADIATION; PURITY ENHANCEMENT LAYERS;

IMAGE ENHANCEMENT; LIGHT REFLECTION; LITHOGRAPHY; MULTILAYERS; RADIATION; ULTRAVIOLET RADIATION;

MIRRORS;

EID: 41549118468     PISSN: 01469592     EISSN: None     Source Type: Journal    
DOI: 10.1364/OL.33.000560     Document Type: Article

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