Oxidation behavior of sputtered CrN/AlN multilayer coatings during heat treatment

Surface and Coatings Technology

Volumn 201, Issue 9-11 SPEC. ISS., 2007, Pages 5138-5142

  Tien, Shih Kang ^a   Duh, Jenq Gong ^a   Lee, Jyh Wei ^b  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b Dong Nan Institute of Science and Technology   (Taiwan)

Author keywords

CrN AlN; Modulation period; Multilayer coating; Oxidation behavior; TEM

Indexed keywords

ALUMINUM NITRIDE; CHROMIUM ALLOYS; HEAT TREATMENT; MAGNETRON SPUTTERING; MULTILAYERS; OXIDATION; OXIDATION RESISTANCE; SURFACE ROUGHNESS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

MULTILAYER COATINGS; OXIDATION BEAVIOR; RF MAGNETRON SPUTTERING TECHNIQUE;

PROTECTIVE COATINGS;

ALUMINUM NITRIDE; CHROMIUM ALLOYS; HEAT TREATMENT; MAGNETRON SPUTTERING; MULTILAYERS; OXIDATION; OXIDATION RESISTANCE; PROTECTIVE COATINGS; SURFACE ROUGHNESS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

EID: 33846544327     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2006.07.094     Document Type: Article

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