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Tribology International

Volumn 39, Issue 4, 2006, Pages 332-341

Tribology and oxidation behavior of TiN/AlN nano-multilayer films

(4) Yao, S H a Su, Y L b Kao, W H c Liu, T H b

a CHANG JUNG CHRISTIAN UNIVERSITY (Taiwan)

b NATIONAL CHENG KUNG UNIVERSITY (Taiwan)

c AIR FORCE INSTITUTE OF TECHNOLOGY (Taiwan)

Author keywords

Oxidation; Period; TiN AlN nano multilayer films; Wear

Indexed keywords

ALUMINUM NITRIDE; HARDNESS; MAGNETRON SPUTTERING; MULTILAYERS; OXIDATION; THIN FILMS; TITANIUM NITRIDE; WEAR OF MATERIALS;

PERIOD; TIN/ALN NANO-MULTILAYER FILMS;

TRIBOLOGY;

EID: 28844476153 PISSN: 0301679X EISSN: None Source Type: Journal
DOI: 10.1016/j.triboint.2005.02.015 Document Type: Article

Times cited : (42)

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