Reactive sputter deposition of polycrystalline nitride and oxide superlattice coatings

Surface and Coatings Technology

Volumn 86-87, Issue PART 1, 1996, Pages 170-176

  Sproul, William D ^a  

^a NORTHWESTERN UNIVERSITY   (United States)

Author keywords

Oxide superlattice coating; Polycrystalline nitride coating; Reactive sputter deposition

Indexed keywords

CRYSTAL GROWTH; DISLOCATIONS (CRYSTALS); HARDENING; HARDNESS; INTERFACES (MATERIALS); OXIDES; POLYCRYSTALLINE MATERIALS; SPUTTER DEPOSITION; SUPERLATTICES;

DISLOCATION MOTION; OXIDE SUPERLATTICE COATING; POLYCRYSTALLINE NITRIDE COATING; REACTIVE SPUTTER DEPOSITION;

PROTECTIVE COATINGS;

EID: 0344820481     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(96)02977-5     Document Type: Article

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