Tunnelling through diamond-like carbon nanofilms deposited by electron-beam-induced deposition

Thin Solid Films

Volumn 517, Issue 24, 2009, Pages 6520-6526

  Balaur, Eugeniu ^a   Peele, Andrew G ^a  

^a LA TROBE UNIVERSITY   (Australia)

Author keywords

Barrier height; Diamond like carbon; Dielectric properties; Electron beam induced deposition; Thin films; Tunneling; XPS

Indexed keywords

ACCELERATING VOLTAGES; BARRIER HEIGHTS; C 1S CORE LEVEL; CONCENTRATION RATIO; DIAMOND LIKE CARBON; DLC FILM; ELECTRON BEAM-INDUCED DEPOSITION; ELECTRON DOSE; HYBRID FORMS; INSULATING PERFORMANCE; NANO FILMS; STRUCTURAL CHARACTERISTICS; X-RAY PHOTOEMISSION SPECTRA; XPS;

CARBON FILMS; DEPOSITION; DIAMOND FILMS; DIAMONDS; DIELECTRIC PROPERTIES; ELECTRON BEAMS; ELECTRONS; EMISSION SPECTROSCOPY; SEMICONDUCTOR JUNCTIONS; THIN FILMS; TUNNELING (EXCAVATION); WIND TUNNELS; X RAY PHOTOELECTRON SPECTROSCOPY;

DIAMOND LIKE CARBON FILMS;

EID: 71749095592     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2009.04.015     Document Type: Article

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