Formation of porous niobium films by oblique angle deposition: Influence of substrate morphology

Thin Solid Films

Volumn 517, Issue 24, 2009, Pages 6711-6716

  Tauseef Tanvir, M ^a   Aoki, Y ^a   Habazaki, H ^a  

^a HOKKAIDO UNIVERSITY   (Japan)

Author keywords

Anodic oxide; Electrolytic capacitor; Oblique angle deposition; Shadowing effect; Textured substrate

Indexed keywords

ANODIC OXIDE; ANODIC OXIDES; OBLIQUE-ANGLE DEPOSITION; SHADOWING EFFECTS; TEXTURED SUBSTRATES;

CAPACITANCE; CAPACITORS; ELECTROLYTIC CAPACITORS; METALLIC FILMS; NIOBIUM; OXIDE FILMS;

SUBSTRATES;

EID: 71749087138     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2009.05.020     Document Type: Article

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