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Volumn 35, Issue 7, 2003, Pages 618-622
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Analysis of anodic films on Nb and NbNx by glow discharge optical emission spectroscopy
b
KEIO UNIVERSITY
(Japan)
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Author keywords
Anodic oxide film; Dielectrics; GDOES; NbNx
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Indexed keywords
ADDITION REACTIONS;
ANNEALING;
CURRENT DENSITY;
EMISSION SPECTROSCOPY;
GLOW DISCHARGES;
HEAT TREATMENT;
INTERFACES (MATERIALS);
LEAKAGE CURRENTS;
LIGHT EMISSION;
NITROGEN;
SPUTTER DEPOSITION;
THICKNESS MEASUREMENT;
ANODIC FILMS;
GLOW DISCHARGE OPTICAL EMISSION SPECTROSCOPY;
NIOBIUM NITRIDE;
NIOBIUM COMPOUNDS;
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EID: 0042440726
PISSN: 01422421
EISSN: None
Source Type: Journal
DOI: 10.1002/sia.1583 Document Type: Article |
Times cited : (22)
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References (14)
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