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Volumn 35, Issue 7, 2003, Pages 618-622

Analysis of anodic films on Nb and NbNx by glow discharge optical emission spectroscopy

(9) Habazaki, H a Matsuo, T a Konno, H a Shimizu, K b Matsumoto, K c Takayama, K c Oda, Y c Skeldon, P d Thompson, G E d

a HOKKAIDO UNIVERSITY (Japan)

b KEIO UNIVERSITY (Japan)

c Cabot Supermetals Co Ltd (Japan)

d UNIVERSITY OF MANCHESTER (United Kingdom)

Author keywords

Anodic oxide film; Dielectrics; GDOES; NbNx

Indexed keywords

ADDITION REACTIONS; ANNEALING; CURRENT DENSITY; EMISSION SPECTROSCOPY; GLOW DISCHARGES; HEAT TREATMENT; INTERFACES (MATERIALS); LEAKAGE CURRENTS; LIGHT EMISSION; NITROGEN; SPUTTER DEPOSITION; THICKNESS MEASUREMENT;

ANODIC FILMS; GLOW DISCHARGE OPTICAL EMISSION SPECTROSCOPY; NIOBIUM NITRIDE;

NIOBIUM COMPOUNDS;

EID: 0042440726 PISSN: 01422421 EISSN: None Source Type: Journal
DOI: 10.1002/sia.1583 Document Type: Article

Times cited : (22)

References (14)

1
- 0032023157
- Pozdeev Y. Qual. Reliab. Eng. Int. 1998; 14: 79.
- (1998) Qual. Reliab. Eng. Int. , vol.14 , pp. 79
- Pozdeev, Y.¹

2
- 0030652356
- Fedorenko, AI, Starikov VV, Pozdeev YL, Lykov IN. Cryst. Res. Tech. 1997; 32: 843.
- (1997) Cryst. Res. Tech. , vol.32 , pp. 843
- Fedorenko, A.I.¹ Starikov, V.V.² Pozdeev, Y.L.³ Lykov, I.N.⁴

3
- 0027607573
- Boiko BT, Kopach VR, Melentjev SM, Pancheha PA, Pozdeev YL, Starikov VV. Thin Solid Films 1993; 229: 207.
- (1993) Thin Solid Films , vol.229 , pp. 207
- Boiko, B.T.¹ Kopach, V.R.² Melentjev, S.M.³ Pancheha, P.A.⁴ Pozdeev, Y.L.⁵ Starikov, V.V.⁶

4
- 0022736634
- Di Quarto F, Senseri C, Piazza S. Ber. Bunsenges. Phys. Chem. 1986, 90: 549.
- (1986) Ber. Bunsenges. Phys. Chem. , vol.90 , pp. 549
- Di Quarto, F.¹ Senseri, C.² Piazza, S.³

5
- 0007427407
- Heusler KE, Schulze M. Electrochim. Acta 1975; 20: 237.
- (1975) Electrochim. Acta , vol.20 , pp. 237
- Heusler, K.E.¹ Schulze, M.²

6
- 0032634741
- Modestov AD, Davydov AD. J. Electroanal. Chem. 1999; 460: 214.
- (1999) J. Electroanal. Chem. , vol.460 , pp. 214
- Modestov, A.D.¹ Davydov, A.D.²

7
- 0035417435
- Duenas S, Castan E, Barbolla J, Kola RR, Sullivan PA. Solid State Electron. 2001; 45: 1441.
- (2001) Solid State Electron. , vol.45 , pp. 1441
- Duenas, S.¹ Castan, E.² Barbolla, J.³ Kola, R.R.⁴ Sullivan, P.A.⁵

8
- 0038636448
- Habazaki H, Matsuo T, Konno H, Shimizu K, Nagata S, Takayama K, Oda Y, Skeldon P, Thompson GE. Thin Solid Films 2003; 429: 159.
- (2003) Thin Solid Films , vol.429 , pp. 159
- Habazaki, H.¹ Matsuo, T.² Konno, H.³ Shimizu, K.⁴ Nagata, S.⁵ Takayama, K.⁶ Oda, Y.⁷ Skeldon, P.⁸ Thompson, G.E.⁹

9
- 0022075813
- Doolittle LR. Nucl. Instrum. Methods 1985; B9: 344.
- (1985) Nucl. Instrum. Methods , vol.B9 , pp. 344
- Doolittle, L.R.¹

10
- 0001999502
- Quarto, FD, Piazza S, Sunseri C. Electrochim. Acta 1990; 35: 99.
- (1990) Electrochim. Acta , vol.35 , pp. 99
- Quarto, F.D.¹ Piazza, S.² Sunseri, C.³

11
- 0035706936
- Shimizu K, Habazaki H, Skeldon P, Thompson GE. Surf. Interface Anal. 2001; 31: 1085.
- (2001) Surf. Interface Anal. , vol.31 , pp. 1085
- Shimizu, K.¹ Habazaki, H.² Skeldon, P.³ Thompson, G.E.⁴

12
- 0003526324
- John Wiley: Chichester
- Payling R, Jones DG, Bengtson A. Glow Discharge Optical Emission Spectrometry. John Wiley: Chichester, 1997.
- (1997) Glow Discharge Optical Emission Spectrometry
- Payling, R.¹ Jones, D.G.² Bengtson, A.³

13
- 0035271491
- Kimura S, Mitsui Y. Appl. Spectrosc. 2001; 55: 292.
- (2001) Appl. Spectrosc. , vol.55 , pp. 292
- Kimura, S.¹ Mitsui, Y.²

14
- 0000305948
- Pringle JPS. Electrochim. Acta 1980; 25: 1420.
- (1980) Electrochim. Acta , vol.25 , pp. 1420
- Pringle, J.P.S.¹

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