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Volumn 35, Issue 7, 2003, Pages 618-622

Analysis of anodic films on Nb and NbNx by glow discharge optical emission spectroscopy

Author keywords

Anodic oxide film; Dielectrics; GDOES; NbNx

Indexed keywords

ADDITION REACTIONS; ANNEALING; CURRENT DENSITY; EMISSION SPECTROSCOPY; GLOW DISCHARGES; HEAT TREATMENT; INTERFACES (MATERIALS); LEAKAGE CURRENTS; LIGHT EMISSION; NITROGEN; SPUTTER DEPOSITION; THICKNESS MEASUREMENT;

EID: 0042440726     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/sia.1583     Document Type: Article
Times cited : (22)

References (14)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.