Breath figure lithography: A facile and versatile method for micropatterning

Journal of Colloid and Interface Science

Volumn 342, Issue 1, 2010, Pages 192-197

  Li, Lei ^a   Zhong, Yawen ^a   Li, Jian ^a   Gong, Jianliang ^a   Ben, Yi ^a   Xu, Jin ^a   Chen, Xiaping ^a   Ma, Zhi ^b  

^a XIAMEN UNIVERSITY   (China)

^b SHANGHAI INSTITUTE OF ORGANIC CHEMISTRY   (China)

Author keywords

Block copolymer; Lithography; Reactive ions etching

Indexed keywords

BLOCK COPOLYMER LITHOGRAPHY; BREATH FIGURES; ETCHING RATE; FACILE METHOD; ICP-RIE; INDUCTIVELY COUPLED-PLASMA REACTIVE ION ETCHING; MICRO PATTERN; MICRO PATTERNING; MICROPATTERNS; POROUS POLYMER FILMS; REACTIVE ION; SOLID SUBSTRATES; SPUTTER COATING; VERSATILE METHODS;

BLOCK COPOLYMERS; COPOLYMERIZATION; INDUCTIVELY COUPLED PLASMA; IONS; LITHOGRAPHY; POLYMER FILMS; POROUS SILICON; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; SILICONES; SUBSTRATES;

REACTIVE ION ETCHING;

GOLD; POLYMER; SILICON; SILOXANE;

ARTICLE; BIOTECHNOLOGICAL PROCEDURES; BREATH FIGURE LITHOGRAPHY; CHEMICAL ANALYSIS; CHEMICAL PROCEDURES; CHEMICAL STRUCTURE; CONTROLLED STUDY; COUPLED PLASMA REACTIVE ION ETCHING; MATERIAL COATING; PRIORITY JOURNAL; SOLID; SYNTHESIS;

EID: 71649098905     PISSN: 00219797     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcis.2009.10.005     Document Type: Article

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