Long-term hermeticity and biological performance of anodically bonded glass-silicon implantable packages

IEEE Transactions on Device and Materials Reliability

Volumn 5, Issue 3, 2005, Pages 458-465

  Harpster, Timothy J ^a,b   Nikles, Stefan A ^a,b   Dokmeci, Mehmet R ^a,b,c,d   Najafi, Khalil ^a,b  

^a IEEE   (United States)

^b UNIVERSITY OF MICHIGAN   (United States)

^c Northeastern University   (United States)

^d HKN ^*

Author keywords

Biocompatible package; Hermetic package; In vivo testing; Microsystems packages

Indexed keywords

BIOCOMPATIBLE PACKAGE; HERMETIC PACKAGE; IN VIVO TESTING; MICROSYSTEMS PACKAGES;

BIOCOMPATIBILITY; HERMETIC DEVICES; PHOSPHATES; SILICON;

BIOTECHNOLOGY;

EID: 29344446643     PISSN: 15304388     EISSN: 15304388     Source Type: Journal    
DOI: 10.1109/TDMR.2005.854374     Document Type: Review

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