Modelling of large-scale microwave plasma sources

Journal of Physics D: Applied Physics

Volumn 42, Issue 19, 2009, Pages

  Ferreira, C M ^a   Tatarova, E ^a   Henriques, J ^a   Dias, F M ^a  

^a INSTITUTO SUPERIOR TÉCNICO   (Portugal)

Author keywords

[No Author keywords available]

Indexed keywords

COMPLEX KINETICS; ELEMENTARY PROCESS; ENERGY EXCHANGES; EXCITED SPECIES; GROUND-STATE MOLECULES; MICROWAVE DISCHARGE; MICROWAVE PLASMA SOURCES; MODEL PREDICTION; PLASMA WALL INTERACTION; POPULATION DENSITIES; SELF-CONSISTENT MODEL; SPATIAL DISTRIBUTION; SPATIAL STRUCTURE; THEORETICAL MODELS;

MICROWAVES; MODELS; PLASMA INTERACTIONS; SIZE DISTRIBUTION; SURFACE DISCHARGES; SURFACE WAVES;

PLASMA SOURCES;

EID: 70350637081     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/42/19/194016     Document Type: Article

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