A microcasted PDMS vacuum pad and its application for stacking thin ceramic layers

Journal of Micromechanics and Microengineering

Volumn 19, Issue 8, 2009, Pages

  Hwang, Sung Jin ^a   Lee, Sang Min ^a   Jung, Im Deok ^a   Jung, Phill Gu ^a   Go, Jeung Sang ^a   Ko, Jong Soo ^a  

^a Pusan National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC LAYER; GREEN SHEETS; METAL MOLD; MICRO HOLES; MICROCASTING; MICROMACHINING PROCESS; MULTI-LAYER CERAMIC CAPACITOR; NICKEL ELECTRODE; PRODUCTION YIELD; THICK DIELECTRICS; TWO STAGE; VACUUM LINE;

CAPACITORS; CERAMIC CAPACITORS; CERAMIC MATERIALS; CHEMICAL MECHANICAL POLISHING; CHEMICAL POLISHING; ELECTRODES; ELECTROFORMING; MICROCHANNELS; MICROMACHINING; MOLDS; NICKEL ALLOYS; SILICONES; VACUUM TECHNOLOGY;

VACUUM;

EID: 70350670525     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/8/085008     Document Type: Article

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