Micro-mould fabrication for a micro-gear via vacuum casting

Journal of Materials Processing Technology

Volumn 192-193, Issue , 2007, Pages 334-339

  Tang, Y ^a   Tan, W K ^a   Fuh, J Y H ^a   Loh, H T ^a   Wong, Y S ^a   Thian, S C H ^a   Lu, L ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Micro fabrication; Micro mould; Photolithography; Vacuum casting

Indexed keywords

CASTING; FABRICATION; GEARS; INTERFEROMETRY; PARAMETER ESTIMATION; SILICONES; VACUUM APPLICATIONS; ELASTOMERS; PHOTOLITHOGRAPHY; PHOTORESISTS; RUBBER MOLDS; VACUUM;

MICRO-MOULD CAVITIES; VACUUM CASTING; WHITE LIGHT INTERFEROMETRY;

MOLDS; FABRICATION;

DIMENSIONAL ANALYSIS; FABRICATION METHOD; MICRO-MOULD; PROCESS PARAMETERS; REPRODUCIBILITIES; SILICONE RUBBER MOULDS; VACUUM CASTING; WHITE-LIGHT INTERFEROMETRY;

EID: 34547512062     PISSN: 09240136     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jmatprotec.2007.04.098     Document Type: Article

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