Finite element modelling of surface acoustic wave device based corrugated microdiaphragms

Smart Materials and Structures

Volumn 18, Issue 9, 2009, Pages

  Dissanayake, Don W ^a   Al Sarawi, Said ^a   Lu, Tien Fu ^a   Abbott, Derek ^a  

^a UNIVERSITY OF ADELAIDE   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

ANALYTICAL MODEL; ANSYS INC.; APPROPRIATE MATERIALS; DEVICE PERFORMANCE; ELEMENT TYPE; FIELD ANALYSIS; FINITE ELEMENT ANALYSIS; FINITE ELEMENT MODELLING; MICRO PUMP; NOVEL METHODS; RADIO FREQUENCY COMMUNICATION; RAYLEIGH-RITZ METHODS; RF SIGNAL; SAW CORRELATOR; SAW DEVICE; SURFACE ACOUSTIC WAVE DEVICE; THREE-DIMENSIONAL MODEL; TRANSCUTANEOUS;

ACOUSTIC WAVES; ACOUSTICS; ACOUSTOELECTRIC EFFECTS; ELECTROSTATIC ACTUATORS; PUMPS; THREE DIMENSIONAL;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 70350666183     PISSN: 09641726     EISSN: 1361665X     Source Type: Journal    
DOI: 10.1088/0964-1726/18/9/095030     Document Type: Article

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