Simulation and optimization of a piezoelectric micropump for medical applications

International Journal of Advanced Manufacturing Technology

Volumn 36, Issue 5-6, 2008, Pages 516-524

  Cui, Qifeng ^a   Liu, Chengliang ^a   Zha, Xuan F ^a,b  

^a SHANGHAI JIAO TONG UNIVERSITY   (China)

^b UNIVERSITY OF MARYLAND   (United States)

Author keywords

Medical application; MEMS; Optimization; Piezoelectric actuation; Simulation; Valveless micropump

Indexed keywords

COMPUTER SIMULATION; MEDICAL APPLICATIONS; MEMS; OPTIMIZATION; PIEZOELECTRIC ACTUATORS;

PIEZOELECTRIC ACTUATION; VALVELESS MICROPUMP;

PUMPS;

EID: 43449116405     PISSN: 02683768     EISSN: 14333015     Source Type: Journal    
DOI: 10.1007/s00170-006-0867-x     Document Type: Article

References (17)

1. Kim J-H, Kang CJ, Kim Y-S (2004) A disposable polydimethylsiloxane-based diffuser micropump actuated by piezoelectric-disc. Microelectron Eng 71(2):119-124
2. Hatch A, Kamholz AE, Holman G, Yager P, Bohringer KF (2001) A ferrofluidic magnetic micropump. J Microelectromech Syst 10(2):215-221
3. Zengerle R, Ulrich J, Kluge S, Richter M, Richter A (1995) A bidirectional silicon micropump. Sens Actuators A 50:81-86
4. Jeong OC, Yang SS (2000) Fabrication and test of a thermopneumatic micropump with a corrugated p+ diaphragm. Sens Actuators A 83(1-3):249-255
5. Cao L, Mantell S, Polla D (2001) Design and simulation of an implantable medical drug delivery system using microelectromechanical systems technology. Sens Actuators A 94(1):117-125
6. Yih TC, Wei C, Hammad B (2005) Modeling and characterization of a nanoliter drug-delivery MEMS micropump with circular bossed membrane. Nanomedicine 1:164-175
7. Stemme E, Stemme G (1993) A valveless diffuser/nozzle-based fluid pump. Sens Actuators A 39(2):159-167
8. Andersson H, van der Wijingaat W, Nilsson P, Enoksson P, Stemme G (2001) A valve-less diffuser micropump for microfluidic analytical systems. Sens Actuators B 72(3):259-265
9. Singhal V, Garimella SV, Murthy JY (2004) Low Reynolds number flow through nozzle-diffuser elements in valveless micropumps. Sens Actuators A 113(2):226-235
10. Li S, Chen S (2003) Analytical analysis of a circular PZT actuator for valveless micropumps. Sens Actuators A 104(2):151-161
11. Mu YH, Hung NP, Ngoi KA (1999) Optimisation design of a piezoelectric micropump. Int J Adv Manuf Technol 15(8):573-576
12. Teymoori MM, Abbaspour-Sani E (2005) Design and simulation of a novel electrostatic peristaltic micromachined pump for drug delivery applications. Sens Actuators A 117(2):222-229
13. Fan B, Song G, Hussain F (2005) Simulation of a piezoelectrically actuated valveless micropump. Smart Mater Struct 14(2):400-405
14. Cui QF, Liu CL, Zha XF (2006) Study on a piezoelectric micropump for the controlled drug delivery system. Microfluid Nanofluid (in press)
15. ANSYS release 9.0 (2004) ANSYS Inc., Canonsburg, PA
16. Olsson A, Enoksson P, Stemme G, Stemme E (1997) Micromachined flat-walled valveless diffuser pumps. J Microelectromech Syst 6(2):161-166
17. Pan LS, Ng TY, Liu GR, Lam KY, Jiang TY (2001) Analytical solutions for the dynamic analysis of a valveless micropump-a fluid-membrane coupling study. Sens Actuators A 93(2):173-181