Analysis of an electrostatic microactuator with the help of matlab/simulink: Transient and frequency characteristics

2000 International Conference on Modeling and Simulation of Microsystems - MSM 2000

Volumn , Issue , 2000, Pages 281-284

  Français, Olivier ^a  

^a Groupe ESIEE   (France)

Author keywords

Electrostatic; Frequency shifting; Modelisation; Numeric method

Indexed keywords

COMPUTER SIMULATION; ELECTROSTATICS; FREQUENCY SHIFT KEYING; MICROSTRUCTURE; NATURAL FREQUENCIES; NUMERICAL METHODS; TRANSIENTS;

DAMPING FACTOR; FREQUENCY SHIFTING; MODELISATION; VOLTAGE POLARIZATION;

MICROACTUATORS;

EID: 0038347591     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

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