Electrostatic microactuator design using surface acoustic wave devices

Lecture Notes in Electrical Engineering

Volumn 20 LNEE, Issue , 2008, Pages 139-151

  Dissanayake, Don W ^a   Al Sarawi, Said F ^a   Abbott, Derek ^a  

^a UNIVERSITY OF ADELAIDE   (Australia)

Author keywords

ANSYS; electrostatic; IDT; microactuator; SAW device; wireless

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; ELECTROSTATICS; MICROACTUATORS; RADIO; ULTRASONIC TRANSDUCERS;

ACTUATION MECHANISM; ANSYS; DISPLACEMENT ANALYSIS; ELECTROSTATIC MICROACTUATORS; INTERDIGITAL TRANSDUCER; SAW DEVICE; STATIC DISPLACEMENT; SURFACE ACOUSTIC WAVES;

ELECTROSTATIC ACTUATORS;

EID: 63049110404     PISSN: 18761100     EISSN: 18761119     Source Type: Book Series    
DOI: 10.1007/978-3-540-79590-2_10     Document Type: Conference Paper

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