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Volumn 6928, Issue , 2008, Pages

Design and characterisation of micro-diaphragm for low power drug delivery applications

Author keywords

ANSYS; Diaphragm; Electrostatic; FEM; Micropump; Microvalve; SAW device

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; BIOMEDICAL EQUIPMENT; ELECTROSTATICS; FINITE ELEMENT METHOD; MICROFLUIDICS;

EID: 44349118654     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.790789     Document Type: Conference Paper
Times cited : (6)

References (11)
  • 1
    • 44349191909 scopus 로고    scopus 로고
    • D. W. Dissanayake, S. Al-Sarawi and D. Abbott, Surface Acoustic Wave Device Based Wireless Passive Microvalve for Microfiuidic Applications, Proc. of SPIE-BioMEMS and Nanotechnology III6799, pp. 67990H: 1-10, De0cember 2007.
    • D. W. Dissanayake, S. Al-Sarawi and D. Abbott, "Surface Acoustic Wave Device Based Wireless Passive Microvalve for Microfiuidic Applications", Proc. of SPIE-BioMEMS and Nanotechnology III6799, pp. 67990H: 1-10, De0cember 2007.
  • 2
    • 0034498290 scopus 로고    scopus 로고
    • Microsensors, micromechanical systems (MEMS), and electronics for smart structures and systems
    • V. K. Varadan and V. V. Varadan, "Microsensors, micromechanical systems (MEMS), and electronics for smart structures and systems", Smart Materials and Structures 9, pp. 953-972, 2000.
    • (2000) Smart Materials and Structures , vol.9 , pp. 953-972
    • Varadan, V.K.1    Varadan, V.V.2
  • 4
    • 34247348235 scopus 로고    scopus 로고
    • D. W. Dissanayake, A. C. Tikka, S. Al-Sarawi and D. Abbott, Radio frequency controlled microvalve for biomedical applications, Proc. of SPIE-Smart Materials IV 6413, pp. 64130D: 1-13, 2007.
    • D. W. Dissanayake, A. C. Tikka, S. Al-Sarawi and D. Abbott, "Radio frequency controlled microvalve for biomedical applications", Proc. of SPIE-Smart Materials IV 6413, pp. 64130D: 1-13, 2007.
  • 5
    • 41849130607 scopus 로고    scopus 로고
    • I. Jones, L. Ricciardi, L. Hall, H. Hansen, V. Varadan, C. Bertram, S. Maddocks, S. Enderling, D. Saint, S. Al-Sarawi and D. Abbott, Wireless RF communication in biomedical applications, Smart Materials and Structures 17, pp. 015050: 1-10, 2008.
    • I. Jones, L. Ricciardi, L. Hall, H. Hansen, V. Varadan, C. Bertram, S. Maddocks, S. Enderling, D. Saint, S. Al-Sarawi and D. Abbott, "Wireless RF communication in biomedical applications", Smart Materials and Structures 17, pp. 015050: 1-10, 2008.
  • 7
    • 33646043487 scopus 로고    scopus 로고
    • Development of perfect silicon corrugated diaphragm using anisotropic etching
    • N. Soin and B. Y. Majlis, "Development of perfect silicon corrugated diaphragm using anisotropic etching", Microelectronic Engineering 83, pp. 1438-1441, 2006.
    • (2006) Microelectronic Engineering , vol.83 , pp. 1438-1441
    • Soin, N.1    Majlis, B.Y.2
  • 8
    • 0038148295 scopus 로고    scopus 로고
    • Performance of a novel non-planer diaphragm for highsensitivity structures
    • W. J. Wang, R. M. Lin, Y. Ren and X. X. Li, "Performance of a novel non-planer diaphragm for highsensitivity structures", Microelectronics Journal 34(9), pp. 791-796, 2003.
    • (2003) Microelectronics Journal , vol.34 , Issue.9 , pp. 791-796
    • Wang, W.J.1    Lin, R.M.2    Ren, Y.3    Li, X.X.4
  • 10
    • 44349184755 scopus 로고    scopus 로고
    • ANSYS Incorporation, Home page. visited on 21/11/2007.
    • ANSYS Incorporation, "Home page". visited on 21/11/2007.
  • 11
    • 0033882350 scopus 로고    scopus 로고
    • Differential capacitive position sensor for planar MEMS structures with vertical motion
    • M. N. Horenstein, J. A. Perreault and T. G. Bifano, "Differential capacitive position sensor for planar MEMS structures with vertical motion", Sensors and Actuators 80, pp. 53-61, 2000.
    • (2000) Sensors and Actuators , vol.80 , pp. 53-61
    • Horenstein, M.N.1    Perreault, J.A.2    Bifano, T.G.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.