A self-acting gas thrust bearing for high-speed microrotors

Journal of Microelectromechanical Systems

Volumn 13, Issue 2, 2004, Pages 158-164

  Wong, Chee Wei ^a   Zhang, Xin ^b   Jacobson, Stuart A ^a   Epstein, Alan H ^a  

^a Massachusetts Institute of Technology   (United States)

^b BOSTON UNIVERSITY   (United States)

Author keywords

Gas bearing; Hydrodynamic spiral groove bearing; Microbearing; Microthrust bearing; Microturbine

Indexed keywords

ELECTRONIC EQUIPMENT MANUFACTURE; ELECTRONIC EQUIPMENT TESTING; HYDROSTATIC BEARINGS; MACHINE DESIGN; MECHANICAL VARIABLES MEASUREMENT; ROTORS; SILICON; TECHNOLOGY; THRUST BEARINGS; TURBINES;

BEARING DESIGN TECHNIQUES; LOAD BEARING CAPABILITY; MICROMOTORS; SELF ACTING GAS THRUST BEARING;

MICROELECTROMECHANICAL DEVICES;

EID: 1942468590     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2004.824900     Document Type: Article

References (15)

1. A. H. Epstein, S. A. Jacobson, J. M. Protz, and L. G. Fréchette, "Shirtbutton-sized gas turbines: the engineering challenges of micro high speed rotating machinery," in 8th International Symposium on Transport Phenomena & Dynamics of Rotating (ISROMAC-8), Honolulu, HI, Mar. 2000.
2. K. Isomura, M. Murayama, and T. Kawakubo, "Feasibility study of a gas turbine at micro scale," presented at the ASME Turbo Expo, 2001, ASME Paper 2001-GT-101.
3. M. Esashi, "Saving energy and natural resource by micro-nanomachining," in Technical Digest of MEMS 2002, The 15th IEEE Int. Conference on Micro Electro Mechanical Systems, Las Vegas, NV, Jan. 2002, pp. 220-227.
4. C. W. Wong, "Design, Fabrication, Experimentation and Analysis of High-Speed Microscale Gas Bearings," Masters of Science Thesis, Massachusetts Institute of Technology, 2001.
5. L. G. Fréchette, S. A. Jacobson, K. S. Breuer, F. F. Ehrich, R. Ghodssi, R. Khanna, C. W. Wong, X. Zhan, M. A. Schmidt, and A. H. Epstein, "Demonstration of a microfab-ricated high-speed turbine supported on gas bearings," in Tech. Dig. Solid-State Sensor and Actuator Workshop, Hilton Head, SC, June 2000, pp. 43-47.
6. C. C. Lin, R. Ghodssi, A. A. Ayon, D.-Z. Chen, S. A. Jacobson, K. S. Breuer, A. H. Epstein, and M. A. Schmidt, "Fabrication and characterization of a micro turbine/bearing rig," in Proc. IEEE the 12th International Conference on Micro Electro Mechanical Systems (MEM '99), Orlando, FL, Jan. 1999, pp. 529-533.
7. C. C. Lin, "Development of a Microfabricated Turbine-Driven Air Bearing Rig," Doctor of Philosophy Thesis, Massachusetts Institute of Technology, 1999.
8. E. A. Muijderman, "Spiral groove bearings," in Philips Technical Library, 1st ed. Eindhoven, The Netherlands: N.V. Philips' Gloeilampenfabrieken, 1966, pp. 59-116.
9. J.-B. Huang, Q.-Y. Yong, and P.-S. Mao, "Gas-lubricated microbearings for microactuators," Sens. Actuators, Phys. A, vol. 35, pp. 69-75, 1992.
10. J.-B. Huang, P.-S. Mao, and R.-Q. Zhang, "Study on Si electrostatic and electroquasistatic micromotors," Sens. Actuators, Phys. A, vol. 35, pp. 171-174, 1993.
11. P. Steranka, "Pressure measurements in a miniature gas bearing," presented at the Gyro Spin Axis Hydrodynamic Bearing Symposium, Cambridge, MA, 1966.
12. B. J. Hamrock, "Fundamentals of fluid film lubrication," in McGraw-Hill Series in Mechanical Engineering, 1st ed. New York: McGraw-Hill, 1994, pp. 329-349.
13. Mechanical Technology Incorporated, Design of Gas Bearings, Mechanical Technology Incorporated, Latham, New York, pp. 6.3.2-6.3.16, 1986.
14. E. S. Piekos, "Numerical Simulation of Gas-Lubricated Journal Bearings for Microfabricated Machines," Doctor of Philosophy Thesis, Massachusetts Institute of Technology, Cambridge, 2000.
15. V. N. Constantinescu and S. Galetuse, "Stabilitys criterion for spiral groove thrust gas bearings," J. Tribology: Trans. ASME, vol. 112, pp. 734-737, Oct. 1990.