-
1
-
-
14044271466
-
High-Speed Microfabricated Silicon Turbomachinery and Fluid Film Bearings
-
L. Fréchette, S. Jacobson, K. Breuer, F. Ehrlich, R. Ghodssi, R. Khanna, C. Wong, X. Zhang, M. Schmidt, and A. Epstein, “High-Speed Microfabricated Silicon Turbomachinery and Fluid Film Bearings”, Journal of Microelectromechanical Systems, 14, 1, pp.141-152 (2005).
-
(2005)
Journal of Microelectromechanical Systems
, vol.14
, Issue.1
, pp. 141-152
-
-
Fréchette, L.1
Jacobson, S.2
Breuer, K.3
Ehrlich, F.4
Ghodssi, R.5
Khanna, R.6
Wong, C.7
Zhang, X.8
Schmidt, M.9
Epstein, A.10
-
2
-
-
3142753424
-
A high-power MEMS electric induction motor
-
C. Livermore, A. Forte, T. Lyszczarz, S. Umans, A. Ayon, and J. Lang, "A high-power MEMS electric induction motor," Journal of Microelectromechanical Systems, 13, pp.465-471 (2004).
-
(2004)
Journal of Microelectromechanical Systems
, vol.13
, pp. 465-471
-
-
Livermore, C.1
Forte, A.2
Lyszczarz, T.3
Umans, S.4
Ayon, A.5
Lang, J.6
-
3
-
-
0026868350
-
Measurement of wear in polysilicon micromotors
-
M. Mehregany, S. D. Senturia, and J. H. Lang, "Measurement of wear in polysilicon micromotors," IEEE Transactions on Electron Devices, 39, pp.1136 (1992).
-
(1992)
IEEE Transactions on Electron Devices
, vol.39
, pp. 1136
-
-
Mehregany, M.1
Senturia, S.D.2
Lang, J.H.3
-
4
-
-
34247593738
-
Dynamic Characterization of a Linear Electrostatic Micromotor Supported on Microball Bearings
-
N. Ghalichechian, A. Modafe, J. H. Lang, and R. Ghodssi, "Dynamic Characterization of a Linear Electrostatic Micromotor Supported on Microball Bearings," Sensors and Actuators: A. Physical, 136, 2, pp.416-503, (2007).
-
(2007)
Sensors and Actuators: A. Physical
, vol.136
, Issue.2
, pp. 416-503
-
-
Ghalichechian, N.1
Modafe, A.2
Lang, J.H.3
Ghodssi, R.4
-
5
-
-
85061935981
-
Design, Fabrication, and Characterization of a Rotary Micromotor Supported on Microball Bearings
-
In Press, December 2007
-
N. Ghalichechian, A. Modafe, M. Beyaz, and R. Ghodssi, "Design, Fabrication, and Characterization of a Rotary Micromotor Supported on Microball Bearings," Journal of Microelectromechanical Systems, In Press, December 2007.
-
Journal of Microelectromechanical Systems
-
-
Ghalichechian, N.1
Modafe, A.2
Beyaz, M.3
Ghodssi, R.4
-
6
-
-
50149087338
-
Measurement and Modeling of Friction in Linear and Rotary Micromotors Supported on Microball Bearings
-
Tucson, AZ, USA, January 13-17
-
N. Ghalichechian, M. McCarthy, M. Beyaz, and R. Ghodssi, "Measurement and Modeling of Friction in Linear and Rotary Micromotors Supported on Microball Bearings," Technical Digest of the IEEE International Conference on Microelectromechanical Systems (MEMS), Tucson, AZ, USA, January 13-17, 2008.
-
(2008)
Technical Digest of the IEEE International Conference on Microelectromechanical Systems (MEMS)
-
-
Ghalichechian, N.1
McCarthy, M.2
Beyaz, M.3
Ghodssi, R.4
-
7
-
-
50049121051
-
MEMS Rotary Actuator using an Integrated Ball Bearing and Air Turbine
-
Lyon, France, June 10-14
-
C. M. Waits, N. Jankowski, B. Geil, and R. Ghodssi, "MEMS Rotary Actuator using an Integrated Ball Bearing and Air Turbine", Technical Digest of the International Conference on Solid-State Sensors and Microsystems (Transducers), Lyon, France, June 10-14, 2007.
-
(2007)
Technical Digest of the International Conference on Solid-State Sensors and Microsystems (Transducers)
-
-
Waits, C.M.1
Jankowski, N.2
Geil, B.3
Ghodssi, R.4
-
8
-
-
50049095023
-
Encapsulated Ball Bearings for Rotary Micromachines
-
C. M. Waits, B. Geil, and R. Ghodssi, "Encapsulated Ball Bearings for Rotary Micromachines," Journal of Micromechanics and Microengineering, 17, pp. S224-S229 (2007).
-
(2007)
Journal of Micromechanics and Microengineering
, vol.17
, pp. S224-S229
-
-
Waits, C.M.1
Geil, B.2
Ghodssi, R.3
-
9
-
-
65949095763
-
Development of a Hybrid Gas/Ball Bearing Support Mechanism for Microturbomachinery
-
Freiburg, Germany, Nov
-
M. McCarthy, C. M. Waits, and R. Ghodssi, "Development of a Hybrid Gas/Ball Bearing Support Mechanism for Microturbomachinery," International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS), Freiburg, Germany, Nov. 28-29, 2007.
-
(2007)
International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (Powermems)
-
-
McCarthy, M.1
Waits, C.M.2
Ghodssi, R.3
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