An electrostatic microactuator system for application in high-speed jets

Journal of Microelectromechanical Systems

Volumn 11, Issue 3, 2002, Pages 222-235

  Huang, Chunchieh ^b   Christophorou, Christophoros ^c   Najafi, Khalil ^a,b   Naguib, Ahmed ^d   Nagib, Hassan M ^c  

^a IEEE   (United States)

^b UNIVERSITY OF MICHIGAN   (United States)

^c ILLINOIS INSTITUTE OF TECHNOLOGY   (United States)

^d Michigan State University   (United States)

Author keywords

Electrostatic; Jet; Microactuators

Indexed keywords

HIGH SPEED JETS;

JETS; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; PRINTED CIRCUIT BOARDS; SECOND HARMONIC GENERATION; SILICON WAFERS;

ELECTROSTATIC ACTUATORS;

EID: 0036601277     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2002.1007401     Document Type: Article

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