Microfabrication on a curved surface using 3D microlens array projection

Journal of Micromechanics and Microengineering

Volumn 19, Issue 10, 2009, Pages

  Li, Lei ^a   Yi, Allen Y ^a  

^a The Ohio State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BULK SILICON; CURVED SUBSTRATES; CURVED SURFACES; DRY ETCHING PROCESS; HIGH DIMENSIONAL ACCURACY; MACHINING TECHNIQUES; MICRO PATTERN; MICRO-FEATURE; MICRO-LENS; MICRO-LENS ARRAYS; MICROFABRICATION PROCESS; MICROMACHINING PROCESS; NON-PLANAR SUBSTRATES; PHOTORESIST LAYERS; PROFILE ERROR; SILICON WAFER SUBSTRATES; THREE-DIMENSIONAL MICROSTRUCTURES; WET-ETCHING PROCESS;

COMPOSITE MICROMECHANICS; LITHOGRAPHY; MEDICAL APPLICATIONS; METALLOGRAPHIC MICROSTRUCTURE; MICROANALYSIS; MICROFABRICATION; MICROLENSES; MICROMACHINING; OPTICAL INSTRUMENT LENSES; PHOTORESISTORS; PLASMA ETCHING; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; SURFACE TREATMENT; THREE DIMENSIONAL; TWO DIMENSIONAL;

SUBSTRATES;

EID: 70350635810     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/10/105010     Document Type: Article

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