The morphology and structure of PVD ZrN-Cu thin films

Journal of Physics D: Applied Physics

Volumn 42, Issue 8, 2009, Pages

  Audronis, M ^a   Jimenez, O ^a   Leyland, A ^a   Matthews, A ^a  

^a UNIVERSITY OF SHEFFIELD   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

BRIGHTFIELD; COLUMNAR GRAIN; COLUMNAR STRUCTURES; COPPER CONTENT; CU THIN FILM; DARK FIELD IMAGING; FIELD EMISSION GUNS; HARDNESS VALUES; INTERGRANULAR PHASE; NANO GRAINS; NANOCRYSTALLINES; UNBALANCED MAGNETRON SPUTTERING; ZRN COATING;

COATINGS; CRYSTALLINE MATERIALS; DISSOLUTION; FIELD EMISSION; HARDENING; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; MORPHOLOGY; SCANNING ELECTRON MICROSCOPY; TEXTURES; THIN FILMS; ZIRCONIUM;

COPPER;

EID: 70350461508     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/42/8/085308     Document Type: Article

References (35)

1. Ezirmik V, Senel E, Kazmanli K, Erdemir A and Urgen M 2007 Effect of copper addition on the temperature dependent reciprocating wear behaviour of CrN coatings Surf. Coat. Technol. 202 866-70
2. Hsieh J H, Cheng M K, Chang Y K, Li C, Chang C L and Liu P C 2008 Effects of annealing on antiwear and antibacteria behaviors of TaN-Cu nanocomposite thin films J. Vac. Sci. Technol. A: Vac. Surf. Films 26 1093-7
3. Kertzman Z, Marchal J, Suarez M, Staia M H, Filip P, Kohli P and Aouadi S M 2008 Mechanical, tribological, and biocompatibility properties of ZrN-Ag nanocomposite films J. Biomed. Mater. Res. Part A 84 1061-7
4. Kuo Y C, Lee J W, Wang C J and Chang Y J 2007 The effect of Cu content on the microstructures, mechanical and antibacterial properties of Cr-Cu-N nanocomposite coatings deposited by pulsed DC reactive magnetron sputtering Surf. Coat. Technol. 202 854-60
5. Ozturk A, Ezirmik K V, Kazmanli K, Urgen M, Eryilmaz O L and Erdemir A 2008 Comparative tribological behaviors of TiN-, CrN- and MoN-Cu nanocomposite coatings Tribol. Int. 41 49-59
6. Baker M A, Kench P J, Tsotsos C, Gibson P N, Leyland A and Matthews A 2005 Investigation of the nanostructure and wear properties of physical vapor deposited CrCuN nanocomposite coatings J. Vac. Sci. Technol. A: Vac. Surf. Films 23 423-33
7. Leyland A and Matthews A 2004 Design criteria for wear-resistant nanostructured and glassy-metal coatings Surf. Coat. Technol. 177-178 317-24
8. Musil J and Vlcek J 1998 Magnetron sputtering of films with controlled texture and grain size Mater. Chem. Phys. 54 116-122
9. Musil J, Zeman P, Hruby H and Mayrhofer P H 1999 ZrN/Cu nanocomposite film-a novel superhard material Surf. Coat. Technol. 120-121 179-83
10. Audronis M, Leyland A, Matthews A, Wen J G and Petrov I 2008 Characterization studies of pulse magnetron sputtered hard ceramic titanium diboride coatings alloyed with silicon Acta Mater. 56 4172-82
11. Audronis M, Leyland A, Kelly P J and Matthews A 2008 Composition and structure-property relationships of chromium-diboride/molybdenum-disulphide PVD nanocomposite hard coatings deposited by pulsed magnetron sputtering Appl. Phys. A: Mater. Sci. Process. 91 77-86
12. Audronis M, Kelly P J, Leyland A and Matthews A 2006 Microstructure of direct current and pulse magnetron sputtered Cr-B coatings Thin Solid Films 515 1511-6
13. Audronis M, Kelly P J, Leyland A and Matthews A 2006 A TEM study of the structure of magnetron sputtered chromium diboride coatings J. Phys.: Conf. Ser. 26 355-8
14. Zhou Z, Rainforth W M, Rother B, Ehiasarian A P, Hovsepian P E and Munz W D 2004 Elemental distributions and substrate rotation in industrial TiAlN/VN superlattice hard PVD coatings Surf. Coat. Technol. 183 275-82
15. Rainforth W M and Zhou Z 2006 On the structure and oxidation mechanisms in nanoscale hard coatings J. Phys.: Conf. Ser. 26 89-94
16. Lloyd S J, Thicker D M, Barber Z H and Blamire M G 2001 Growth of niobium nitride/aluminium nitride trilayers and multilayers Phil. Mag. A: Phys. Condens. Matter Struct. Defects Mech. Prop. 81 2317-35
17. Lloyd S J and Molina-Aldareguia J M 2003 Multilayered materials: a palette for the materials artist Phil. Trans. R. Soc. A: Math. Phys. Eng. Sci. 361 2931-49
18. Lloyd S J, Molina-Aldareguia J M and Clegg W J 2005 Structural characterization of TiN/NbN multilayers: x-ray diffraction, energy-filtered TEM and Fresnel contrast techniques compared J. Microsc. 217 241-59
19. Dirks A G and van den Broek J J 1985 Metastable solid solutions in vapor deposited Cu-Cr, Cu-Mo, and Cu-W thin films J. Vac. Sci. Technol. A: Vac. Surf. Films 3 2618-22
20. Holleck H 1988 Metastable coatings-prediction of composition and structure Surf. Coat. Technol. 36 151-9
21. Holleck H 1990 Basic principles of specific applications of ceramic materials as protective layers Surf. Coat. Technol. 43-44 245-58
22. Holleck H and Schulz H 1987 Advanced layer material constitution Thin Solid Films 153 11-7
23. Holleck H W 1990 Advanced concepts of PVD hard coatings Vacuum 41 2220-2
24. Payne A P and Clemens B M 1992 Metastable copper-chromium alloy films J. Mater. Res. 7 1370-6
25. Aouadi S M, Basnyat P, Zhang Y, Ge Q and Filip P 2006 Grain boundary sliding mechanisms in ZrN-Ag, ZrN-Au, and ZrN-Pd nanocomposite films Appl. Phys. Lett. 88 1-3
26. Jimenez O, Audronis M, Baker M A, Matthews A and Leyland A 2008 Structure and mechanical properties of nitrogen-containing Zr-Cu based thin films deposited by pulsed magnetron sputtering J. Phys. D: Appl. Phys. 41 155301
27. Petrov I, Barna P B, Hultman L and Greene J E 2003 Microstructural evolution during film growth J. Vac. Sci. Technol. A: Vac. Surf. Films 21 S117-S28
28. Audronis M 2007 Deposition and characterization of boron-based coatings by sputtering from loosely-packed powder targets PhD Thesis Department of Engineering Materials, University of Sheffield p 148
29. Audronis M, Kelly P J, Arnell R D, Leyland A and Matthews A 2005 The structure and properties of chromium diboride coatings deposited by pulsed magnetron sputtering of powder targets Surf. Coat. Technol. 200 1366-71 (Pubitemid 41762155)
30. Audronis M, Matthews A and Leyland A 2008 Pulsed-bias magnetron sputtering of non-conductive crystalline chromia films at low substrate temperature J. Phys. D: Appl. Phys. 41 035309
31. Stuart R V and Wehner G K 1964 Energy distribution of sputtered Cu atoms J. Appl. Phys. 35 1819-24
32. Ehiasarian A P, Gonzalvo Y A and Whitmore T D 2007 Time-resolved ionisation studies of the high power impulse magnetron discharge in mixed argon and nitrogen atmosphere Plasma Process. Polym. 4 S309-13
33. x coatings synthesized by dc and pulsed dc magnetron sputtering Thin Solid Films 517 1887-94
34. Lin J, Moore J J, Mishra B, Pinkas M, Sproul W D and Rees J A 2008 Effect of asynchronous pulsing parameters on the structure and properties of CrAlN films deposited by pulsed closed field unbalanced magnetron sputtering (P-CFUBMS) Surf. Coat. Technol. 202 1418-36
35. Mader W, Fischmeister H F and Bergmann E 1989 Defect structure of ion-plated titanium nitride coatings Thin Solid Films 182 141-52