Structural characterization of TiN/NbN multilayers: X-ray diffraction, energy-filtered TEM and Fresnel contrast techniques compared

Journal of Microscopy

Volumn 217, Issue 3, 2005, Pages 241-259

  Lloyd, Stephen J ^a   Molina Aldareguia, J M ^b   Clegg, W J ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^b CEIT   (Spain)

Author keywords

Composition profile; Energy filtered TEM; Fresnel contrast analysis; Hardness; Multilayers; TiN NbN; X ray diffraction

Indexed keywords

HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; MULTILAYERS; TIN; TITANIUM NITRIDE;

COMPOSITION PROFILE; DIFFRACTION ENERGY; ENERGY FILTERED TEM; ENERGY FILTERED TRANSMISSION ELECTRON MICROSCOPY; FRESNEL CONTRAST ANALYSE; FRESNEL CONTRASTS; LOWER RESOLUTION; STRUCTURAL CHARACTERIZATION; TIN/NBN; X- RAY DIFFRACTIONS;

X RAY DIFFRACTION;

NOBELIUM; TITANIUM;

ARTICLE; CHEMICAL COMPOSITION; CONTRAST ENHANCEMENT; HARDNESS; PRIORITY JOURNAL; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION;

EID: 14744296826     PISSN: 00222720     EISSN: None     Source Type: Journal    
DOI: 10.1111/j.1365-2818.2005.01454.x     Document Type: Article

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