Effects of annealing on antiwear and antibacteria behaviors of TaN-Cu nanocomposite thin films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 26, Issue 4, 2008, Pages 1093-1097

  Hsieh, J H ^a   Cheng, M K ^a   Chang, Y K ^a   Li, C ^b   Chang, C L ^c   Liu, P C ^a  

^a MING CHI UNIVERSITY OF TECHNOLOGY   (Taiwan)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^c MINGDAO UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; ANNEALING; COPPER ALLOYS; EPITAXIAL GROWTH; FIELD EMISSION; FILM GROWTH; GRAIN SIZE AND SHAPE; HEALTH; IRON; NANOCOMPOSITES; NANOPARTICLES; NANOSTRUCTURED MATERIALS; NANOSTRUCTURES; PARTICLE SIZE; PHOTOACOUSTIC EFFECT; RAPID THERMAL ANNEALING; RAPID THERMAL PROCESSING; SIZE DISTRIBUTION; SOLID LUBRICANTS; SOLIDS; STEEL ANALYSIS; SUBSTRATES; TANNING; TANTALUM COMPOUNDS; TENSILE STRENGTH; THICK FILMS; THIN FILMS; TOOL STEEL; TRIBOLOGY; WEAR RESISTANCE;

(1 1 0) SURFACE; ANTI-WEAR; ANTIBACTERIA; ANTIBACTERIAL EFFECTS; ANTIBACTERIAL PROPERTIES; APPLIED (CO); CU NANO-PARTICLES; CU THIN FILMS; FIELD-EMISSION SCANNING ELECTRON MICROSCOPY (FE-SEM); FILM SURFACES; FRICTION AND WEAR; NANO-COMPOSITE FILMS; NANOCOMPOSITE THIN FILMS; NUCLEATION AND GROWTH; PARTICLE DISTRIBUTIONS; RAPID THERMAL ANNEALING (RTA); REACTIVE CO-SPUTTERING; SI(2 1 1) SUBSTRATES; STEEL SUBSTRATES; TESTING RESULTS; TRIBOLOGICAL BEHAVIORS; WEAR TRACKS;

COPPER;

EID: 46449093303     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2900660     Document Type: Article

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