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Volumn 183, Issue 2-3, 2004, Pages 275-282
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Elemental distributions and substrate rotation in industrial TiAlN/VN superlattice hard PVD coatings
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Author keywords
Energy filtered TEM; Numerical prediction; Substrate rotation; TiAlN VN multilayers
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Indexed keywords
COATING TECHNIQUES;
ELECTRON SPECTROSCOPY;
PHYSICAL VAPOR DEPOSITION;
SCANNING ELECTRON MICROSCOPY;
SUBSTRATES;
SUPERLATTICES;
TRANSMISSION ELECTRON MICROSCOPY;
ELECTRON SPECTROSCOPIC IMAGES (ESI);
FIELD EMISSION GUN TRANSMISSION ELECTRON MICROSCOPE;
TITANIUM ALLOYS;
COATING;
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EID: 2442547442
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/j.surfcoat.2003.09.060 Document Type: Article |
Times cited : (42)
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References (22)
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