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Volumn 183, Issue 2-3, 2004, Pages 275-282

Elemental distributions and substrate rotation in industrial TiAlN/VN superlattice hard PVD coatings

Author keywords

Energy filtered TEM; Numerical prediction; Substrate rotation; TiAlN VN multilayers

Indexed keywords

COATING TECHNIQUES; ELECTRON SPECTROSCOPY; PHYSICAL VAPOR DEPOSITION; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; SUPERLATTICES; TRANSMISSION ELECTRON MICROSCOPY;

EID: 2442547442     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2003.09.060     Document Type: Article
Times cited : (42)

References (22)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.