Very low surface recombination velocity on p -type c -Si by high-rate plasma-deposited aluminum oxide

Applied Physics Letters

Volumn 95, Issue 15, 2009, Pages

  Saint Cast, Pierre ^a   Kania, Daniel ^a   Hofmann, Marc ^a   Benick, Jan ^a   Rentsch, Jochen ^a   Preu, Ralf ^a  

^a FRAUNHOFER INSTITUTE FOR SOLAR ENERGY SYSTEMS ISE   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACCUMULATION LAYERS; ALUMINUM OXIDES; EFFECTIVE FIELD; HIGH RATE; IN-LINE; NEGATIVE CHARGE; ORDER OF MAGNITUDE; P-TYPE; P-TYPE SILICON; P-TYPE SUBSTRATES; RECOMBINATION VELOCITY; SURFACE RECOMBINATION VELOCITIES;

ALUMINA; ALUMINUM; PASSIVATION; PLASMA DEPOSITION; PLASMAS;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

EID: 70350227357     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3250157     Document Type: Article

References (29)

1. A. G. Aberle, Prog. Photovoltaics 1062-7995 8, 473 (2000). 10.1002/1099-159X(200009/10)8:5<473::AID-PIP3373.0.CO;2-D
2. D. Macdonald and L. J. Geerligs, Appl. Phys. Lett. 0003-6951 85, 4061 (2004). 10.1063/1.1812833
3. S. W. Glunz, S. Rein, J. Y. Lee, and W. Warta, J. Appl. Phys. 0021-8979 90, 2397 (2001). 10.1063/1.1389076 (Pubitemid 33600658)
4. R. Hezel and K. Jaeger, J. Electrochem. Soc. 0013-4651 136, 518 (1989). 10.1149/1.2096673
5. R. Hezel, Solid-State Electron. 0038-1101 24, 863 (1981). 10.1016/0038-1101(81)90103-9
6. S. Dauwe, L. Mittelstädt, A. Metz, and R. Hezel, Prog. Photovoltaics 1062-7995 10, 271 (2002). 10.1002/pip.420
7. J. Zhao, A. Wang, and M. A. Green, Prog. Photovoltaics 1062-7995 7, 471 (1999). 10.1002/(SICI)1099-159X(199911/12)7:6<471::AID-PIP2983.0.CO;2-7
8. J. Benick, B. Hoex, M. C. M. van de Sanden, W. M. M. Kessels, O. Schultz, and S. Glunz, Appl. Phys. Lett. 0003-6951 92, 253504 (2008). 10.1063/1.2945287
9. L. Gautero, M. Hofmann, J. Rentsch, A. Lemke, S. Mack, J. Seiffe, J. -F. Nekarda, D. Biro, A. Wolf, B. Bitnar, J. -M. Sallese, and R. Preu, Proceedings of the 34th IEEE Photovoltaic Specialist Conference, Philadelphia, 2009 (unpublished).
10. M. Hofmann, C. Schmidt, N. Kohn, J. Rentsch, S. Glunz, and R. Preu, Prog. Photovoltaics 1062-7995 16, 509 (2008). 10.1002/pip.835
11. M. J. Kerr, Ph.D. thesis, Australian National University, 2002.
12. A. Cuevas, M. Stuckings, J. Lau, and M. Petravic, Proceedings of the 14th European Photovoltaic Solar Energy Conference, Barcelona, Spain, 1997 (unpublished).
13. S. Miyajima, J. Irikawa, A. Yamada, and M. Konagai, 23rd European Photovoltaic Solar Energy Conference, Valencia, Spain, 2008 (unpublished).
14. G. Agostinelli, P. Vitanov, Z. Alexieva, A. Harizanova, H. F. W. Dekkers, S. de Wolf, and G. Beaucarne, Proceedings of the 19th European Photovoltaic Solar Energy Conference and Exhibition, Paris, 2004 (unpublished).
15. B. Hoex, S. B. S. Heil, E. Langereis, M. C. M. van de Sanden, and W. M. M. Kessels, Appl. Phys. Lett. 0003-6951 89, 042112 (2006). 10.1063/1.2240736 (Pubitemid 44147566)
16. B. Hoex, J. Schmidt, R. Bock, P. P. Altermatt, M. C. M. d. Sanden, and W. M. M. Kessels, Appl. Phys. Lett. 0003-6951 91, 112107 (2007). 10.1063/1.2784168 (Pubitemid 47415990)
17. T. T. Li and A. Cuevas, Phys. Status Solidi RRL 3, 160 (2009). 10.1002/pssr.200903140
18. B. Hoex, J. Schmidt, P. Pohl, M. C. M. d. Sanden, and W. M. M. Kessels, J. Appl. Phys. 0021-8979 104, 044903 (2008). 10.1063/1.2963707
19. J. Schmidt, A. Merkle, R. Brendel, B. Hoex, M. C. M. van de Sanden, and W. M. M. Kessels, Prog. Photovoltaics 1062-7995 16, 461 (2008). 10.1002/pip.823
20. L. P. Riikka, J. Appl. Phys. 0021-8979 97, 121301 (2005). 10.1063/1.1940727 (Pubitemid 40940570)
21. W. J. Soppe, B. G. Duijelaar, S. E. A. Schiermeier, A. W. Weeber, A. Steiner, and F. M. Schuurmens, Proceedings of the 16th European Photovoltaic Solar Energy Conference, Glasgow, 2000 (unpublished).
22. A. W. Stephens, A. G. Aberle, and M. A. Green, J. Appl. Phys. 76, 363 (1994). 10.1063/1.357082
23. R. A. Sinton, A. Cuevas, and M. Stuckings, Proceedings of the 25th IEEE Photovoltaic Specialists Conference, Washington DC, USA, 1996 (unpublished).
24. J. Rentsch, Ph.D. thesis, Albert-Ludwigs University, 2005.
25. K. P. Pande, V. K. R. Nair, and D. Gutierrez, J. Appl. Phys. 0021-8979 54, 5436 (1983). 10.1063/1.332725 (Pubitemid 14450366)
26. R. Castagne and A. Vapaille, Surf. Sci. 0039-6028 28, 157 (1971). 10.1016/0039-6028(71)90092-6
27. R. S. Johnson, G. Lucovsky, and I. Baumvol, J. Vac. Sci. Technol. A 0734-2101 19, 1353 (2001). 10.1116/1.1379316
28. S. W. Glunz, D. Biro, S. Rein, and W. Warta, J. Appl. Phys. 0021-8979 86, 683 (1999). 10.1063/1.370784
29. B. Hoex, J. J. H. Gielis, M. C. M. van de Sanden, and W. M. M. Kessels, J. Appl. Phys. 0021-8979 104, 113703 (2008). 10.1063/1.3021091