A numerical fatigue damage model for life scatter of MEMS devices

Journal of Microelectromechanical Systems

Volumn 18, Issue 5, 2009, Pages 1016-1031

  Jalalahmadi, Behrooz ^a   Sadeghi, Farshid ^a   Peroulis, Dimitrios ^a  

^a PURDUE UNIVERSITY   (United States)

Author keywords

Damage mechanics; Fatigue behavior; Material microstructure; Microelectromechanical systems (MEMS) devices; Numerical simulation

Indexed keywords

DAMAGE MECHANICS; FATIGUE BEHAVIOR; MATERIAL MICROSTRUCTURE; MICROELECTROMECHANICAL SYSTEMS (MEMS) DEVICES; NUMERICAL SIMULATION;

COMPOSITE MICROMECHANICS; MATERIALS PROPERTIES; MATHEMATICAL MODELS; MECHANICS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE; NORMAL DISTRIBUTION; SIMULATORS; WELDS;

FATIGUE DAMAGE;

EID: 70349998754     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2009.2024800     Document Type: Article

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