Influence of specimen size and sub-micron notch on the fracture behavior of single crystal silicon microelements and nanoscopic AFM damage evaluation

Materials Research Society Symposium - Proceedings

Volumn 546, Issue , 1999, Pages 15-20

  Komai, Kenjiro ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; BENDING (DEFORMATION); BRITTLE FRACTURE; ELASTICITY; ETCHING; FATIGUE TESTING; FRACTURE TOUGHNESS; ION BEAMS; SCANNING ELECTRON MICROSCOPY; SINGLE CRYSTALS;

FOCUSED ION BEAMS; SILICON MICROELEMENTS;

SILICON;

EID: 0033350506     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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