On-wafer crystallization of ultralow-K pure silica zeolite films

Angewandte Chemie - International Edition

Volumn 48, Issue 26, 2009, Pages 4777-4780

  Lew, Christopher M ^a   Sun, Minwei ^a   Cai, Rui ^a   Wang, Junlan ^a   Kloster, Grant ^c   Boyanov, Boyan ^c   Yan, Yushan ^b  

^a University of Washington   (United States)

^b University of California Riverside   (United States)

^c INTEL CORPORATION   (United States)

Author keywords

Inorganic thin films; On wafer crystallization; Silica; Structure property relationships; Zeolites

Indexed keywords

CRYSTALLIZATION PROCESS; HYDROTHERMAL PROCESS; INORGANIC THIN FILMS; MESOPORE SIZES; ON-WAFER; ON-WAFER CRYSTALLIZATION; PURE SILICA ZEOLITES; SPIN-ON; STRUCTURE-PROPERTY RELATIONSHIPS; ULTRALOW-K;

CRYSTALLIZATION; SILICA; SILICATE MINERALS; SURFACE ROUGHNESS; THIN FILMS; ZEOLITES;

MECHANICAL PROPERTIES;

EID: 70349946979     PISSN: 14337851     EISSN: None     Source Type: Journal    
DOI: 10.1002/anie.200900461     Document Type: Article

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