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Volumn 18, Issue 21, 2008, Pages 3454-3460

Pure-silica-zeolite MFI and MEL low-dielectric-constant films with fluoro-organic functionalization

(10) Lew, Christopher M a Li, Zijian b Li, Shuang a Hwang, Son Jong c Liu, Yan a Medina, Dora I a Sun, Minwei a Wang, Junlan a Davis, Mark E c Yan, Yushan a

a University of California Riverside (United States)

b Hughes Aircraft Co (United States)

c California Institute of Technology (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION; CALCINATION; CONTACT ANGLE; FLUORINE; GAS ADSORPTION; GRAVIMETRIC ANALYSIS; HYDROPHOBICITY; MICROSCOPIC EXAMINATION; NUCLEAR MAGNETIC RESONANCE; NUCLEAR MAGNETIC RESONANCE SPECTROSCOPY; SILANES; SILICA; SILICATE MINERALS; SILICON; SPIN DYNAMICS; THERMOGRAVIMETRIC ANALYSIS; WATER CONTENT; ZEOLITES;

FUNCTIONALIZED; FUNCTIONALIZED NANOPARTICLES; K VALUES; LOW WATER CONTENTS; MOISTURE ADSORPTIONS; NITROGEN ADSORPTIONS; ORGANIC FUNCTIONALIZATION; SILYLATION; SOLID-STATE NMR; SPIN-ON; SYNTHESIS METHODS; SYNTHESIS OF; SYNTHESIS SOLUTIONS; TYPE STRUCTURES; WATER CONTACT ANGLES; X-RAY DIFFRACTIONS; ZEOLITE FILMS; ZEOLITE POWDERS;

FILM PREPARATION;

EID: 55849083877 PISSN: 1616301X EISSN: 16163028 Source Type: Journal
DOI: 10.1002/adfm.200800390 Document Type: Article

Times cited : (66)

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