메뉴 건너뛰기




Volumn , Issue , 2009, Pages 547-600

Wafer level chip scale packaging

Author keywords

Adhesion; BCB; Bumping; Photo resists; PI; Polymers; Redistribution; Thin film; UBM; Wafer level packaging; WL CSP

Indexed keywords


EID: 70349697117     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1007/978-0-387-78219-5_16     Document Type: Chapter
Times cited : (11)

References (49)
  • 1
    • 33845586992 scopus 로고    scopus 로고
    • Microelectronic packaging
    • M. H. Geng (ed), McGraw-Hill, New York
    • M. Töpper, D. Tönnies, Microelectronic packaging, in: Semiconductor Fabrication Handbook, M. H. Geng (ed), McGraw-Hill, New York, 2005, pp. 21.1-21.54
    • (2005) Semiconductor Fabrication Handbook , pp. 211-2154
    • Töpper, M.1    Tönnies, D.2
  • 2
    • 0003860827 scopus 로고    scopus 로고
    • Part 1-3, R. Tummala, E. Rymaszewski, A. Klopfenstein (eds), Chapman & Hall, New York
    • Microelectronic Packaging Handbook, Part 1-3, R. Tummala, E. Rymaszewski, A. Klopfenstein (eds), Chapman & Hall, New York, 1997
    • (1997) Microelectronic Packaging Handbook
  • 3
    • 0003511837 scopus 로고    scopus 로고
    • P. Garrou, I. Turlik (eds) McGraw-Hill, New York
    • Multichip Module Technology Handbook, P. Garrou, I. Turlik (eds), McGraw-Hill, New York, 1998
    • (1998) Multichip Module Technology Handbook
  • 10
    • 0033687377 scopus 로고    scopus 로고
    • Wafer level chip scale packaging (WL-CSP): An overview
    • 200
    • P. Garrou, "Wafer Level Chip Scale Packaging (WL-CSP): An Overview", IEEE Trans. Adv. Packaging, 2000, 23 (2), 200, p. 198
    • (2000) IEEE Trans. Adv. Packaging , vol.23 , Issue.2 , pp. 198
    • Garrou, P.1
  • 11
    • 6744247095 scopus 로고    scopus 로고
    • Wafer level packaging has arrived
    • October
    • P. Garrou, "Wafer Level Packaging has Arrived", Semiconductor International, October 2000, p. 1192
    • (2000) Semiconductor International , pp. 1192
    • Garrou, P.1
  • 12
    • 84892810727 scopus 로고    scopus 로고
    • SECAP, International advanced packaging consortium: Formed to standardize process equipment for wafer level packaging technologies for 300 mm
    • 10 July
    • M. Töpper, H. Reichl, SECAP, International Advanced Packaging Consortium: Formed to Standardize Process Equipment for Wafer Level Packaging Technologies for 300 mm, Future Fab, 10 July, 2001
    • (2001) Future Fab
    • Töpper, M.1    Reichl, H.2
  • 14
    • 0343888756 scopus 로고    scopus 로고
    • Springer Verlag, Berlin
    • H. Reichl, "Direktmontage", Springer Verlag, Berlin, 1998
    • (1998) Direktmontage
    • Reichl, H.1
  • 17
    • 84892791991 scopus 로고    scopus 로고
    • Anorganische Strukturchemie
    • Auflage
    • U. Müller, "Anorganische Strukturchemie", Teubner Verlag, 3. Auflage 1996
    • (1996) Teubner Verlag , vol.3
    • Müller, U.1
  • 19
    • 0019680001 scopus 로고
    • Solder bump fabrication by electrochemical method for FC interconnection
    • T. Kawanobe, K. Miyamoto, Y. Inaba, "Solder Bump Fabrication by Electrochemical Method for FC Interconnection", IEEE Publication CH1671-7/0000, 1981, p. 149
    • (1981) IEEE Publication CH1671-7/0000 , pp. 149
    • Kawanobe, T.1    Miyamoto, K.2    Inaba, Y.3
  • 20
    • 33845570883 scopus 로고    scopus 로고
    • Conformance of ECD wafer bumping to future demands on CSP, 3D Integration, and MEMS
    • San Diego
    • L. Dietrich, M. Toepper, O. Ehrmann, H. Reichl, "Conformance of ECD Wafer Bumping to Future Demands on CSP, 3D Integration, and MEMS", Proceedings of the ECTC, San Diego, 2006, p. 1050
    • (2006) Proceedings of the ECTC , pp. 1050
    • Dietrich, L.1    Toepper, M.2    Ehrmann, O.3    Reichl, H.4
  • 27
    • 84892814043 scopus 로고    scopus 로고
    • Leadfree solder deposition for wafer level packaging applications
    • Nov
    • Bioh Kim, "Leadfree Solder Deposition for Wafer Level Packaging Applications" 5th Annual SECAP East Asia Seminar Series, Nov. 2004
    • (2004) 5th Annual SECAP East Asia Seminar Series
    • Kim, B.1
  • 30
    • 0003937505 scopus 로고
    • Diazonaphtoquinoe-based resists
    • Press Bellingham, WA
    • R. Dammel, Diazonaphtoquinoe-Based Resists, SPIE Optical Engineering Press, Bellingham, WA, Vol. TT-11, 1993
    • (1993) SPIE Optical Engineering , vol.TT-11
    • Dammel, R.1
  • 36
    • 33845587911 scopus 로고    scopus 로고
    • The importance of polymers in WLP
    • E. Zschech, C. Whelan, T. Mikolajick (eds), Springer, Berlin
    • M. Töpper, The Importance of Polymers in WLP, in: Materials for Information Technology, E. Zschech, C. Whelan, T. Mikolajick (eds), Springer, Berlin, 2005
    • (2005) Materials for Information Technology
    • Töpper, M.1
  • 40
    • 17744404194 scopus 로고    scopus 로고
    • Interfacial adhesion analysis of BCB / TiW / Cu / PbSn technology in wafer level packaging
    • M. Töpper, A. Achen, H. Reichl, "Interfacial Adhesion Analysis of BCB / TiW / Cu / PbSn Technology in Wafer Level Packaging", Proceedings ECTC 2003, p. 1843
    • (2003) Proceedings ECTC , pp. 1843
    • Töpper, M.1    Achen, A.2    Reichl, H.3
  • 42
    • 84892787099 scopus 로고
    • Studies on the surface modification of BCB film
    • Boston Nov
    • K.W. Paik, R.J. Saia, J.J. Chera, "Studies on the Surface Modification of BCB Film", Proceedings MRS, Boston, Nov. 1990
    • (1990) Proceedings MRS
    • Paik, K.W.1    Saia, R.J.2    Chera, J.J.3
  • 43
    • 84892785578 scopus 로고    scopus 로고
    • Surface modification due to technological treatment evaluated by SPM and XPS techniques
    • Berlin April
    • F. Krause, K. Halser, K. Scherpinski, M. Töpper, "Surface Modification due to Technological Treatment Evaluated by SPM and XPS Techniques", Proceedings MicroMat, Berlin, April 2000
    • (2000) Proceedings MicroMat
    • Krause, F.1    Halser, K.2    Scherpinski, K.3    Töpper, M.4
  • 47
    • 84892832897 scopus 로고    scopus 로고
    • Evaluation of copper penetration in low-k polymer dielectrics by biastemperature stress
    • A. Loke et al., "Evaluation of copper penetration in low-k polymer dielectrics by biastemperature stress", MRS Spring Meeting, Symposium N/O, 1999, p. 1
    • (1999) MRS Spring Meeting, Symposium N/O , pp. 1
    • Loke, A.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.