In-situ studies of high-κ dielectrics for graphene-based devices

ECS Transactions

Volumn 19, Issue 5, 2009, Pages 215-224

  Pirkle, A ^a   Chabal, Y J ^a   Colombo, L ^b   Wallace, R M ^a  

^a The University of Texas at Dallas   (United States)

^b TEXAS INSTRUMENTS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; ALUMINUM OXIDE; ATOMIC FORCE MICROSCOPY; CMOS INTEGRATED CIRCUITS; DEPOSITION; DIELECTRIC FILMS; GRAPHENE DEVICES; HAFNIUM OXIDES; MORPHOLOGY; ULTRAHIGH VACUUM; X RAY PHOTOELECTRON SPECTROSCOPY;

EX-SITU ATOMIC FORCE MICROSCOPY; IN-SITU STUDY; PHYSISORBED; SITU X-RAY PHOTOELECTRON SPECTROSCOPY; VACUUM-ANNEALING;

GRAPHENE;

EID: 70349694712     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/1.3119545     Document Type: Conference Paper

References (29)

1. Castro Neto, A.H., Guinea, F., Peres, M.R., Novoselov, K.S., Geim, A.K., Reviews of Modern Physics, 81(1), 109 (2009)
2. Lemme, M. C., Echtermeyer, T. J., Baus, M., and Kurz, H., IEEE Electron Device Letters, 28(4), 282. (2007)
3. Lin, Y., Jenkins, K. A., Valdes-Garcia, A., Small, J. P., Farmer, D. B., and Avouris, P., Nano Letters, 9(1), 422. (2009)
4. Kim, S., Nah, J., Jo, I., Shahrjerdi, D., Colombo, L., Yao, Z., Tutuc, E., and Banerjee, S. K., Appl. Phys. Lett. (2009), in press.
5. Meric, I., Han, M. Y., Young, A. F., Ozyilmaz, B., Kim, P., and Shepard, K. L., Nat Nano, 3(11), 654. (2008)
6. Green, M. L., Ho, M. Y., Busch, B., Wilk, G. D., Sorsch, T., Conard, T., Brijs, B., Vandervorst, W., Raisanen, P. I., Muller, D., Bude, M., and Grazul, J., Journal of Applied Physics, 92(12), 7168. (2002)
7. Lee, B., Park, S., Kim, H., Cho, K, Vogel, E. M., Kim, M. J., Wallace, R. M., and Kim, J., Applied Physics Letters, 92(20), 203102. (2008)
8. Farmer, D. B. and Gordon, R. G., Nano Lett, 6(4), 699. (2006)
9. Novoselov, K., Geim, A., Morozov, S., Jiang, D., Zhang, Y., Dubonos, S., Grigorieva, I., and Firsov, A., Science, 306 (5696), 666. (2004)
10. Chu, X. and Schmidt, L.D., Industrial and Engineering Chemistry Research 32(7), 1359 (1993)
11. Wallace, R. M., Electro. Chem. Soc. Trans., 16(5), 255. (2008)
12. Omicron Nanotechnology, Gmbh., http://www.omicron.de/
13. Horcas, I., Fernández, R., Gómez-Rodriguez, J., Colchero, J., Gómez-Herrero, J., and Baro, A., Review of Scientific Instruments, 78, 013705. (2007)
14. Jeurgens, L. P. H., Sloof, W. G., Tichelaar, F. D., and Mittemeijer, E. J., Journal of Applied Physics, 92(3), 1649. (2002)
15. Ma, Q. and Rosenberg, R. A., Surface Science, 391(1-3), L1224. (1997)
16. Sette, F., Wertheim, G. K., Ma, Y., Meigs, G., Modesti, S., and Chen, C. T., Phys. Rev. B, 41(14), 9766. (1990)
17. Maruyama, B., Ohuchi, F., and Rabenberg, L., Journal of Materials Science Letters, 9(7), 864. (1990)
18. Alexander, M., Thompson, G., and Beamson, G., Surface and Interface Analysis, 29(7), 468. (2000)
19. Ferrari, A. C., Meyer, J. C., Scardaci, V., Casiraghi, C., Lazzeri, M., Mauri, F., Piscanec, S., Jiang, D., Novoselov, K. S., Roth, S., and Geim, A. K., Physical Review Letters, 97(18), 187401. (2006)
20. Tuinstra, F. and Koenig, J., Journal of Chemical Physics, 53(3), 1126. (1970)
21. Gupta, A., Chen, G., Joshi, P., Tadigadapa, S., and Eklund, P., Nano Lett, 6(12), 2667. (2006)
22. Thomsen, C. and Reich, S., Phys. Rev. Lett., 85(24), 5214. (2000)
23. Wang, Y., Alsmeyer, D. C., and McCreery, R. L., Chemistry of Materials, 2(5), 557. (1990)
24. Mak, K. F., Sfeir, M. Y., Wu, Y., Lui, C. H., Misewich, J. A., and Heinz, T. F., Physical Review Letters, 101(19), 196405. (2008)
25. Tremblay, M. and Paynter, R., Surface and Interface Analysis, 35(6), 502-514. (2003)
26. Simmons, J., Nichols, B., Baker, S., Marcus, M. S., Castellini, O., Lee, C, Hamers, R., and Eriksson, M., Journal of Physical Chemistry B, 110(14), 7113. (2006)
27. Kern, W., Handbook of Semiconductor Wafer Cleaning Technology, p. 233-273, Noyes Publications, New Jersey (1993)
28. Vig, J.R., J. Vac. Sci. Technol. A, 3(3), 1027 (1985)
29. Tracz, A., Wegner, G., Rabe, J., Langmuir 19(17), 6807 (2003)