A decade of step and flash imprint lithography

Journal of Photopolymer Science and Technology

Volumn 22, Issue 2, 2009, Pages 147-153

  Grant Willson, C ^a  

^a The University of Texas at Austin   (United States)

Author keywords

BEOL; Nano imprint; Step and flash imprint lithography; Templates

Indexed keywords

EID: 70349283932     PISSN: 09149244     EISSN: 13496336     Source Type: Journal    
DOI: 10.2494/photopolymer.22.147     Document Type: Article

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