SCOPUS 정보 검색 플랫폼

Volumn 82, Issue 1, 2005, Pages 60-70

Simulation of fluid flow in the step and flash imprint lithography process

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; FLUID MECHANICS; LUBRICATION; MATHEMATICAL MODELS; MONOMERS; OPTICAL SYSTEMS; OPTIMIZATION; PHOTOLITHOGRAPHY; PHOTORESISTS;

CAPILLARY NUMBERS; IMPRINTING; LUBRICATION THEORY; MULTIPLE FLUID DROPS; STEP AND FLASH IMPRINT LITHOGRAPHY (SFIL);

FLOW OF FLUIDS;

EID: 24644474741 PISSN: 01679317 EISSN: None Source Type: Journal
DOI: 10.1016/j.mee.2005.06.002 Document Type: Article

Times cited : (77)

References (12)

1
- 0036355561
- T.C. Bailey, S.C. Johnson, S.V. Sreenivasan, J.G. Ekerdt, C.G. Willson, and D.J. Resnick J. Photopolymer Sci. Technol. 15 3 2002 481 486
- (2002) J. Photopolymer Sci. Technol. , vol.15 , Issue.3 , pp. 481-486
- Bailey, T.C.¹ Johnson, S.C.² Sreenivasan, S.V.³ Ekerdt, J.G.⁴ Willson, C.G.⁵ Resnick, D.J.⁶

2
- 5344268855
- J. Haisma, M. Verheijen, K. Van den Heuvel, and J. Van den Berg J. Vac. Sci. Technol. B 14 1996 4124 4129
- (1996) J. Vac. Sci. Technol. B , vol.14 , pp. 4124-4129
- Haisma, J.¹ Verheijen, M.² Van Den Heuvel, K.³ Van Den Berg, J.⁴

3
- 24644463065
- T.C. Bailey, S.C. Johnson, M.D. Dickey, B.J. Smith, A.T. Jamieson, E.K. Kim, N.A. Stacey, D. Mancini, W.J. Dauksher, K. Nordquist, D.J. Resnick, S.V. Sreenivasan, J.G. Ekerdt, C.G. Willson, in: Proceedings of the 39th Interface Symposium, 2002.
- (2002) Proceedings of the 39th Interface Symposium
- Bailey, T.C.¹ Johnson, S.C.² Dickey, M.D.³ Smith, B.J.⁴ Jamieson, A.T.⁵ Kim, E.K.⁶ Stacey, N.A.⁷ Mancini, D.⁸ Dauksher, W.J.⁹ Nordquist, K.¹⁰ Resnick, D.J.¹¹ Sreenivasan, S.V.¹² Ekerdt, J.G.¹³ Willson, C.G.¹⁴

4
- 24644480891
- M. Colburn, A. Grot, M. Amistoso, B.J. Choi, T. Bailey, J. Ekerdt, S.V. Sreenivasan, J. Hollenhorst, and C.G. Willson Proc. SPIE 3997 2000 435
- (2000) Proc. SPIE , vol.3997 , pp. 435
- Colburn, M.¹ Grot, A.² Amistoso, M.³ Choi, B.J.⁴ Bailey, T.⁵ Ekerdt, J.⁶ Sreenivasan, S.V.⁷ Hollenhorst, J.⁸ Willson, C.G.⁹

5
- 5344241941
- S.Y. Chou, P.R. Krauss, and P.J. Renstrom J. Vac. Sci. Technol. B 14 1996 4129 4133
- (1996) J. Vac. Sci. Technol. B , vol.14 , pp. 4129-4133
- Chou, S.Y.¹ Krauss, P.R.² Renstrom, P.J.³

6
- 0347902948
- H.C. Scheer, H. Schulz, T. Hoffmann, and S. Torres J. Vac. Sci. Technol. B 16 1998 3917 3921
- (1998) J. Vac. Sci. Technol. B , vol.16 , pp. 3917-3921
- Scheer, H.C.¹ Schulz, H.² Hoffmann, T.³ Torres, S.⁴

7
- 0033262706
- B. Heidari, I. Maximov, E. Sarwe, and L. Montelius J. Vac. Sci. Technol. B 17 6 1998 2961 2964
- (1998) J. Vac. Sci. Technol. B , vol.17 , Issue.6 , pp. 2961-2964
- Heidari, B.¹ Maximov, I.² Sarwe, E.³ Montelius, L.⁴

8
- 4344692571
- M. Colburn, B.J. Choi, S.V. Sreenivasan, R.T. Bonnecaze, and C.G. Willson Microelectron. Eng. 75 2004 321 329
- (2004) Microelectron. Eng. , vol.75 , pp. 321-329
- Colburn, M.¹ Choi, B.J.² Sreenivasan, S.V.³ Bonnecaze, R.T.⁴ Willson, C.G.⁵

9
- 0003825067
- Oxford University Press New York
- W.M. Deen Analysis of Transport Phenomena 1998 Oxford University Press New York
- (1998) Analysis of Transport Phenomena
- Deen, W.M.¹

10
- 24644451850
- submitted for publication
- S. Reddy, R.T. Bonnecaze, Phys. Fluids, submitted for publication.
- Phys. Fluids
- Reddy, S.¹ Bonnecaze, R.T.²

11
- 0019367877
- C.W. Hirt, and B.D. Nichols J. Comp. Phys. 39 1981 201 225
- (1981) J. Comp. Phys. , vol.39 , pp. 201-225
- Hirt, C.W.¹ Nichols, B.D.²

12
- 13244249982
- S.D. Schuetter, G.A. Dicks, G.F. Nellis, R.L. Engelstad, and E.G. Lovell J. Vac. Sci. Technol. B 22 6 2004 3312 3317
- (2004) J. Vac. Sci. Technol. B , vol.22 , Issue.6 , pp. 3312-3317
- Schuetter, S.D.¹ Dicks, G.A.² Nellis, G.F.³ Engelstad, R.L.⁴ Lovell, E.G.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.