Substrate atom enriched carbon nanostructures fabricated by focused electron beam induced deposition

Nanotechnology

Volumn 19, Issue 46, 2008, Pages

  Tripathi, Sarvesh K ^a   Shukla, Neeraj ^a   Kulkarni, Vishwas N ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY KANPUR   (India)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC PHYSICS; ATOMS; ELECTRON BEAM LITHOGRAPHY; ELECTRON BEAMS; ELECTRON GUNS; ELECTRON IRRADIATION; FABRICATION; NANOSTRUCTURES; PARTICLE BEAMS; VACUUM DEPOSITION;

CARBON NANO STRUCTURES; FOCUSED ELECTRON BEAM INDUCED DEPOSITIONS; GROWTH PROCESSES; IRRADIATION TIMES; LOCAL TEMPERATURES; LOW PRESSURES; NANO CONES; NANOPATTERNS; PRECURSOR GASSES; SUBSTRATE ATOMS; SUBSTRATE MATERIALS; VACUUM ATMOSPHERES;

SUBSTRATES;

CARBON; NANOCONE; NANOMATERIAL;

ARTICLE; ATOM; ELECTRON BEAM; GAS; IRRADIATION; PRIORITY JOURNAL; TEMPERATURE;

EID: 58149260328     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/19/46/465302     Document Type: Article

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