Correlation between ion beam parameters and physical characteristics of nanostructures fabricated by focused ion beam

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 266, Issue 8, 2008, Pages 1468-1474

  Tripathi, Sarvesh K ^a   Shukla, Neeraj ^a   Kulkarni, Vishwas N ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY KANPUR   (India)

Author keywords

EDAX; Focused ion beam; Nano structure fabrication; SEM

Indexed keywords

CONTAMINATION; CORRELATION METHODS; ELECTRODEPOSITION; ENERGY DISPERSIVE X RAY ANALYSIS; FOCUSED ION BEAMS; SCANNING ELECTRON MICROSCOPY;

ELECTRON EFFECTS; ION BEAM PARAMETERS; METALLIC QUALITY; ROUGH MORPHOLOGY;

NANOSTRUCTURES;

EID: 43049179361     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2007.12.071     Document Type: Article

References (8)

1. Reyntjens S., and Puers R. J. Micromech. Microeng. 11 (2001) 287
2. Tseng A.A. J. Micromech. Microeng. 14 (2004) R15
3. Fujita J., Ishida M., Sakamoto T., Ochiai Y., Kaito T., and Matsui S. J. Vac. Sci. Technol. B 19 (2001) 2834
4. Smith S., Walton A.J., Bond S., Ross A.W.S., Stevenson J.T.M., and Gundlach A.M. IEEE Trans. Semiconduct. Manuf. 16 (2003) 199
5. Schilling A., Adams T., Bowman R.M., and Gregg J.M. Nanotechnology 18 (2007) 035301
6. Fujii T., Iwasaki K., Munekane M., Yamamoto Y., Takeuchi T., Hasuda M., Ikku Y., Tashiro H., Asahata T., Kiyohara M., and Kaito T. Mater. Res. Soc. Symp. Proc. 983 (2007) LL08
7. Gardner G.A., and Cahn R.W. J. Mater. Sci. Lett. 1 (1966) 211
8. Funsten H.O. Nucl. Instr. and Meth. B 72 (1992) 83