Localized Parylene-C bonding with reactive multilayer foils

Journal of Physics D: Applied Physics

Volumn 42, Issue 18, 2009, Pages

  Qiu, Xiaotun ^a   Zhu, Jie ^a   Oiler, Jon ^b   Yu, Cunjiang ^a   Wang, Ziyu ^b   Yu, Hongyu ^a,b  

^a Arizona State University   (United States)

^b ARIZONA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIOMICROELECTROMECHANICAL SYSTEMS; BONDING PROCESS; BONDING TECHNIQUES; BROAD APPLICATION; DOMINANT PRODUCT; EXPERIMENTAL OBSERVATION; HEAT OF REACTION; ISOPROPANOL ALCOHOLS; JOINING PROCESS; LEAKAGE TESTS; LOCAL HEAT SOURCE; LOCALIZED HEATING; MICRO FLUIDIC SYSTEM; MULTILAYER FOILS; NUMERICAL MODELS; PARYLENE C; PARYLENES; SIMULATION RESULT; TEMPERATURE EVOLUTION; XRD MEASUREMENTS;

DIFFERENTIAL SCANNING CALORIMETRY; EXOTHERMIC REACTIONS; JOINING; MEMS; MICROELECTROMECHANICAL DEVICES; MULTILAYERS; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; X RAY DIFFRACTION; X RAY DIFFRACTION ANALYSIS;

WAFER BONDING;

EID: 70149101983     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/42/18/185411     Document Type: Article

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