Optimization of energy scope for titanium nitride films grown by ion beam-assisted deposition

Chinese Physics Letters

Volumn 23, Issue 1, 2006, Pages 178-181

  Li, Wei ^a   Ma, Zhong Quan ^a   Wang, Ye ^a   Wang, De Ming ^a  

^a SHANGHAI UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

FILM GROWTH; ION BEAM ASSISTED DEPOSITION; ION BEAMS; ION BOMBARDMENT; SPUTTERING; TIN;

ATOMIC DISPLACEMENT; BINARY COLLISION APPROXIMATIONS; DEPOSITED ENERGY; ENERGY; INTERACTION MODELING; ION-SOLID INTERACTIONS; IONS BOMBARDMENT; OPTIMISATIONS; SURFACE MONOLAYERS; TITANIUM NITRIDE FILMS;

TITANIUM NITRIDE;

EID: 32644451229     PISSN: 0256307X     EISSN: 17413540     Source Type: Journal    
DOI: 10.1088/0256-307X/23/1/052     Document Type: Article

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