Ion beam induced anisotropic deformation of Si nanosprings

Journal of Physics D: Applied Physics

Volumn 42, Issue 14, 2009, Pages

  Nagar, Rupali ^a   Patzig, C ^b   Rauschenbach, B ^b   Sathe, V ^c   Kanjilal, D ^d   Mehta, B R ^a   Singh, J P ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY DELHI   (India)

^b LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM   (Germany)

^c UGC DAE CONSORTIUM FOR SCIENTIFIC RESEARCH   (India)

^d INTER UNIVERSITY ACCELERATOR CENTRE   (India)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPIC DEFORMATION; ATOMIC FORCE MICROSCOPES; FORCE-DISTANCE SPECTROSCOPY; GLANCING ANGLE DEPOSITION; HIGHER LOADS; ION FLUENCES; LIQUID NITROGEN TEMPERATURE; MECHANICAL STRENGTH; NANOSPRINGS; POLYSTYRENE SPHERES; SI (1 1 1);

ANISOTROPY; ATOMIC SPECTROSCOPY; COATINGS; DEFORMATION; ION BEAMS; LIQUID NITROGEN; POLYSTYRENES; SILICA; SILICON; STIFFNESS;

IONS;

EID: 70149089866     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/42/14/145404     Document Type: Article

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